A Systematic Study of Metal-assisted Chemical Etching Parameters for Well-Ordered Silicon Nanowire Array Fabrication

2012 ◽  
Vol 1408 ◽  
Author(s):  
Arif S. Alagoz ◽  
Tansel Karabacak
Keyword(s):  
Silicon Nanowires ◽  
Chemical Etching ◽  
Crystalline Silicon ◽  
Silicon Nanowire ◽  
Etching Rate ◽  
Nanowire Array ◽  
Lithium Ion ◽  
Nanowire Diameter ◽  
Silicon Nanowire Array ◽  
Metal Assisted Chemical Etching

ABSTRACTMetal-assisted chemical etching is a simple and low-cost silicon nanowire fabrication method which allows control of nanowire diameter, length, shape and orientation. In this work, we fabricated well-ordered silicon nanowire array by patterning gold thin film by nanosphere lithography and etching single crystalline silicon wafer by metal-assisted chemical etching technique. We investigated relation between etched solution concentration and nanowire morphology, wafer crystal orientation, etching rate. This well-ordered silicon nanowires arrays have the potential applications in many fields but especially next generation energy related applications from solar cells to lithium-ion batteries.

scholarly journals Reusable Surface-Enhanced Raman Spectroscopy Substrates Made of Silicon Nanowire Array Coated with Silver Nanoparticles Fabricated by Metal-Assisted Chemical Etching and Photonic Reduction

Nanomaterials ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 1531 ◽  
Author(s):  
Shi Bai ◽  
Yongjun Du ◽  
Chunyan Wang ◽  
Jian Wu ◽  
Koji Sugioka
Keyword(s):  
Silver Nanoparticles ◽  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Surface Enhanced Raman Spectroscopy ◽  
Sers Substrate ◽  
Silicon Nanowire Array ◽  
Surface Enhanced ◽  
Surface Enhanced Raman ◽  
Metal Assisted Chemical Etching

Surface-enhanced Raman spectroscopy (SERS) has advanced over the last four decades and has become an attractive tool for highly sensitive analysis in fields such as medicine and environmental monitoring. Recently, there has been an urgent demand for reusable and long-lived SERS substrates as a means of reducing the costs associated with this technique To this end, we fabricated a SERS substrate comprising a silicon nanowire array coated with silver nanoparticles, using metal-assisted chemical etching followed by photonic reduction. The morphology and growth mechanism of the SERS substrate were carefully examined and the performance of the fabricated SERS substrate was tested using rhodamine 6G and dopamine hydrochloride. The data show that this new substrate provides an enhancement factor of nearly 1 × 108. This work demonstrates that a silicon nanowire array coated with silver nanoparticles is sensitive and sufficiently robust to allow repeated reuse. These results suggest that this newly developed technique could allow SERS to be used in many commercial applications.

Ultrathin Silicon Nanowires Produced by a Bi-Metal-Assisted Chemical Etching Method for Highly Stable Lithium-Ion Battery Anodes

NANO ◽  
2020 ◽  
Vol 15 (06) ◽  
pp. 2050076
Author(s):  
Fang Sun ◽  
Zhiyuan Tan ◽  
Zhengguang Hu ◽  
Jun Chen ◽  
Jie Luo ◽  
...  
Keyword(s):  
Lithium Ion Batteries ◽  
Lithium Ion Battery ◽  
Silicon Nanowires ◽  
Chemical Etching ◽  
Silicon Nanowire ◽  
High Capacity ◽  
Lithium Ion ◽  
Average Diameter ◽  
Sei Layer ◽  
Metal Assisted Chemical Etching

Silicon is widely studied as a high-capacity lithium-ion battery anode. However, the pulverization of silicon caused by a large volume expansion during lithiation impedes it from being used as a next generation anode for lithium-ion batteries. To overcome this drawback, we synthesized ultrathin silicon nanowires. These nanowires are 1D silicon nanostructures fabricated by a new bi-metal-assisted chemical etching process. We compared the lithium-ion battery properties of silicon nanowires with different average diameters of 100[Formula: see text]nm, 30[Formula: see text]nm and 10[Formula: see text]nm and found that the 30[Formula: see text]nm ultrathin silicon nanowire anode has the most stable properties for use in lithium-ion batteries. The above anode demonstrates a discharge capacity of 1066.0[Formula: see text]mAh/g at a current density of 300[Formula: see text]mA/g when based on the mass of active materials; furthermore, the ultrathin silicon nanowire with average diameter of 30[Formula: see text]nm anode retains 87.5% of its capacity after the 50th cycle, which is the best among the three silicon nanowire anodes. The 30[Formula: see text]nm ultrathin silicon nanowire anode has a more proper average diameter and more efficient content of SiOx. The above prevents the 30[Formula: see text]nm ultrathin silicon nanowires from pulverization and broken during cycling, and helps the 30[Formula: see text]nm ultrathin silicon nanowires anode to have a stable SEI layer, which contributes to its high stability.

Metal-Assisted Chemical Etching Using Silica Nanoparticle for the Fabrication of a Silicon Nanowire Array

2012 ◽  
Vol 51 (2) ◽  
pp. 02BP09 ◽  
Author(s):  
Shinya Kato ◽  
Yuya Watanabe ◽  
Yasuyoshi Kurokawa ◽  
Akira Yamada ◽  
Yoshimi Ohta ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Silica Nanoparticle ◽  
Silicon Nanowire Array ◽  
Metal Assisted Chemical Etching

Metal-Assisted Chemical Etching Using Silica Nanoparticle for the Fabrication of a Silicon Nanowire Array

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BP09 ◽  
Author(s):  
Shinya Kato ◽  
Yuya Watanabe ◽  
Yasuyoshi Kurokawa ◽  
Akira Yamada ◽  
Yoshimi Ohta ◽  
...  
Keyword(s):  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Silica Nanoparticle ◽  
Silicon Nanowire Array ◽  
Metal Assisted Chemical Etching

A review and analysis on growth and optical absorption properties of silicon nanowire array for photovoltaic applications

2015 ◽  
Vol 29 (30) ◽  
pp. 1530007 ◽  
Author(s):  
Ritu Sharma ◽  
Lalit Kumar Dusad
Keyword(s):  
Solar Cells ◽  
Silicon Nanowires ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Major Research ◽  
Absorption Properties ◽  
Silicon Nanowire Array ◽  
Photovoltaic Applications ◽  
Research Findings ◽  
Experimental Approaches

In this paper, optical absorptions in silicon nanowires (SiNWs) arrays obtained from theoretical studies and experimental approaches have been reviewed. A brief description on the different growth techniques for SiNW arrays reported so far is presented. Comparative analysis based on major research findings has been done and the advantages of SiNW-based solar cells over thin film solar cells are presented. Furthermore, future aspects of the use of SiNWs for photovoltaic applications are discussed.

Thermoelectric Properties of Silicon Nanowire Array and Spin-on Glass Composites Fabricated with CMOS-compatible Techniques

2012 ◽  
Vol 1408 ◽  
Author(s):  
Benjamin M. Curtin ◽  
John E. Bowers
Keyword(s):  
Thermal Conductivity ◽  
Seebeck Coefficient ◽  
Silicon Nanowires ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Square Lattice ◽  
Glass Composites ◽  
Si Substrates ◽  
Silicon Nanowire Array ◽  
Work Interference

ABSTRACTSilicon nanowires (NWs) are promising thermoelectric materials as they offer large reductions in thermal conductivity over bulk Si without a significant decrease in the Seebeck coefficient or electrical conductivity. In this work, interference lithography was used to pattern a square lattice photoresist template over 2 cm x 2 cm Si substrates. The resulting vertical Si NW arrays were 1 μm tall with a packing density of ~15%, and the diameter of the Si NWs were 80 - 90 nm. The Si NW arrays were then embedded in spin-on glass (SOG) to form a dense composite material with a measured thermal conductivity of 1.45 W/m-K at 300 K. Devices were fabricated for cross-plane Seebeck coefficient measurements and the Si NW/SOG composite was found to have a Seebeck coefficient of roughly -284 μV/K, which is similar to bulk Si with the same doping. We also report a combined power generation of 29.3 μW from both the Si NW array and Si substrate with a temperature difference of 56 K and 50 μm x 50 μm device area.

Environmental Sustainability of Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium-Ion Battery Anode

2019 ◽  
Vol 17 (1) ◽  
Author(s):  
Fenfen Wang ◽  
Xianfeng Gao ◽  
Lulu Ma ◽  
Chris Yuan
Keyword(s):  
Lithium Ion Battery ◽  
Silicon Nanowires ◽  
Environmental Sustainability ◽  
Ag Nanoparticles ◽  
Chemical Etching ◽  
Lithium Ion ◽  
Process Data ◽  
Sustainability Performance ◽  
Metal Assisted Chemical Etching ◽  
Si Wafer

Abstract Silicon nanowires (SiNWs) with three different average diameters of 90, 120, and 140 nm were synthesized by a metal-assisted chemical etching (MACE) method. Environmental sustainability of the MACE process was studied by investigating material consumptions, gas emissions, and silver nanoparticle concentrations in nitric acid solutions for 1 g of SiNWs and 1 kW h of lithium-ion battery (LIB) electrodes. It was found that the process for 90 nm SiNWs has the best sustainability performance compared with the other two processes. Specifically, in this study for 1 g of 90 nm SiNWs, 8.845 g of Si wafer is consumed, 1.09 g of H2 and 1.04 g of NO are produced, and 54.807 mg of Ag nanoparticles are found in the HNO3 solution. Additionally, for 1 kW h of LIB electrodes, the process for 90 nm SiNWs results in 1.943 kg of Si wafer consumption, 239.455 g of H2 and 239.455 g of NO emissions, and 12.040 g of Ag nanoparticles concentrations. By quantitatively investigating the material consumptions and emissions, this study assesses the sustainability performance of the MACE process for synthesizing SiNWs for use in LIBs, and thus it provides process data for the analysis and the development of sustainable production methods for SiNWs and similar anode materials for next-generation LIBs.

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