Origin of Reflection High Energy Electron Diffraction Intensity Oscillation during Homoepitaxial Growth on GaAs(001)

Journal of the Physical Society of Japan ◽

10.1143/jpsj.80.063602 ◽

2011 ◽

Vol 80 (6) ◽

pp. 063602 ◽

Author(s):

Takaaki Kawamura ◽

Peter A. Maksym

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation ◽

Homoepitaxial Growth

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Monte Carlo simulation of reentrant reflection high-energy electron diffraction intensity oscillation observed during low-temperature GaAs growth

Applied Physics Letters ◽

10.1063/1.123318 ◽

1999 ◽

Vol 74 (22) ◽

pp. 3275-3277 ◽

Author(s):

Haruyuki Yasuda ◽

Hideo Ohno

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Diffraction ◽

Low Temperature ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation ◽

Low Temperature Gaas

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Reflection high‐energy electron diffraction intensity oscillation study of InGaAs and InAlAs on InP: Application to pseudomorphic heterostructures

Applied Physics Letters ◽

10.1063/1.98723 ◽

1987 ◽

Vol 51 (15) ◽

pp. 1173-1175 ◽

Author(s):

J.‐L. Lievin ◽

C. G. Fonstad

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high-energy electron diffraction intensity oscillation during layer-by-layer oxidation of Si(001) surfaces

Applied Physics Letters ◽

10.1063/1.123308 ◽

1999 ◽

Vol 74 (22) ◽

pp. 3284-3286 ◽

Author(s):

Heiji Watanabe ◽

Toshio Baba ◽

Masakazu Ichikawa

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

Layer By Layer ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high energy electron diffraction intensity oscillation study of the growth of GaAs on GaAs(111)A

Surface Science ◽

10.1016/0039-6028(94)90546-0 ◽

1994 ◽

Vol 315 (1-2) ◽

pp. 105-111 ◽

Author(s):

K. Sato ◽

M.R. Fahy ◽

B.A. Joyce

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Layer‐by‐layer sublimation observed by reflection high‐energy electron diffraction intensity oscillation in a molecular beam epitaxy system

Applied Physics Letters ◽

10.1063/1.96194 ◽

1985 ◽

Vol 47 (3) ◽

pp. 286-288 ◽

Author(s):

Takeshi Kojima ◽

Naoyuki J. Kawai ◽

Tadashi Nakagawa ◽

Kimihiro Ohta ◽

Tsunenori Sakamoto ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

Layer By Layer ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation ◽

Molecular Beam Epitaxy System

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Reflection high-energy electron diffraction intensity oscillation study of Ga desorption from molecular beam epitaxially grown AlxGa1−xAs

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583383 ◽

1986 ◽

Vol 4 (2) ◽

pp. 594 ◽

Author(s):

J. Ralston

Keyword(s):

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection High-Energy Electron Diffraction Intensity Oscillation — An Effective Tool of Si and GexSi1-x Molecular Beam Epitaxy

Thin Film Growth Techniques for Low-Dimensional Structures - NATO ASI Series ◽

10.1007/978-1-4684-9145-6_13 ◽

1987 ◽

pp. 225-245

Author(s):

Tsunenori Sakamoto ◽

Kunihiro Sakamoto ◽

Satoru Nagao ◽

Gen Hashiguchi ◽

Katsuya Kuniyoshi ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high‐energy electron diffraction intensity oscillation induced by electric current during Si epitaxial growth on Si (001) 2×1 surfaces

Applied Physics Letters ◽

10.1063/1.102198 ◽

1989 ◽

Vol 55 (17) ◽

pp. 1715-1717 ◽

Author(s):

K. Nishimori ◽

H. Tokutaka ◽

T. Tamon ◽

S. Kishida ◽

N. Ishihara

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Electric Current ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high‐energy electron diffraction intensity monitored homoepitaxial growth of SrTiO3 buffer layer by pulsed laser deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578784 ◽

1993 ◽

Vol 11 (3) ◽

pp. 637-641 ◽

Author(s):

M. Y. Chern ◽

A. Gupta ◽

B. W. Hussey ◽

T. M. Shaw

Keyword(s):

Electron Diffraction ◽

Pulsed Laser Deposition ◽

Buffer Layer ◽

Pulsed Laser ◽

High Energy ◽

Energy Electron ◽

Laser Deposition ◽

High Energy Electron ◽

Diffraction Intensity ◽

Homoepitaxial Growth

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Summary Abstract: Reflection high-energy electron diffraction intensity oscillation during the growth of GaAs by chemical-beam epitaxy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584377 ◽

1988 ◽

Vol 6 (2) ◽

pp. 642 ◽

Author(s):

T. H. Chiu

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

Chemical Beam Epitaxy ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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