Reflection high‐energy electron diffraction intensity oscillation induced by electric current during Si epitaxial growth on Si (001) 2×1 surfaces

Applied Physics Letters ◽

10.1063/1.102198 ◽

1989 ◽

Vol 55 (17) ◽

pp. 1715-1717 ◽

Author(s):

K. Nishimori ◽

H. Tokutaka ◽

T. Tamon ◽

S. Kishida ◽

N. Ishihara

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Electric Current ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Comparison between ultraviolet-photoelectron spectroscopy and reflection high-energy electron diffraction intensity oscillations during Si epitaxial growth on Si(100)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580731 ◽

1997 ◽

Vol 15 (3) ◽

pp. 911-914 ◽

Author(s):

Y. Enta ◽

H. Irimachi ◽

M. Suemitsu ◽

N. Miyamoto

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Photoelectron Spectroscopy ◽

High Energy ◽

Energy Electron ◽

Ultraviolet Photoelectron Spectroscopy ◽

High Energy Electron ◽

Diffraction Intensity

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Monte Carlo simulation of reentrant reflection high-energy electron diffraction intensity oscillation observed during low-temperature GaAs growth

Applied Physics Letters ◽

10.1063/1.123318 ◽

1999 ◽

Vol 74 (22) ◽

pp. 3275-3277 ◽

Author(s):

Haruyuki Yasuda ◽

Hideo Ohno

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Electron Diffraction ◽

Low Temperature ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation ◽

Low Temperature Gaas

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Reflection high‐energy electron diffraction intensity oscillation study of InGaAs and InAlAs on InP: Application to pseudomorphic heterostructures

Applied Physics Letters ◽

10.1063/1.98723 ◽

1987 ◽

Vol 51 (15) ◽

pp. 1173-1175 ◽

Author(s):

J.‐L. Lievin ◽

C. G. Fonstad

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high-energy electron diffraction intensity oscillation during layer-by-layer oxidation of Si(001) surfaces

Applied Physics Letters ◽

10.1063/1.123308 ◽

1999 ◽

Vol 74 (22) ◽

pp. 3284-3286 ◽

Author(s):

Heiji Watanabe ◽

Toshio Baba ◽

Masakazu Ichikawa

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

Layer By Layer ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection high‐energy electron diffraction intensity oscillations and surface reconstructions measured during epitaxial growth of Si(001) from Si2H6 molecular beams

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577758 ◽

1992 ◽

Vol 10 (4) ◽

pp. 1846-1855 ◽

Author(s):

S. M. Mokler ◽

W. K. Liu ◽

N. Ohtani ◽

B. A. Joyce

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Molecular Beams ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Surface Reconstructions

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Dynamics of reflection high‐energy electron diffraction intensity oscillations during molecular beam epitaxial growth of GaAs on (111)BGaAs substrates

Applied Physics Letters ◽

10.1063/1.102878 ◽

1990 ◽

Vol 56 (25) ◽

pp. 2533-2535 ◽

Author(s):

M. Y. Yen ◽

T. W. Haas

Keyword(s):

Electron Diffraction ◽

Epitaxial Growth ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

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Reflection high energy electron diffraction intensity oscillation study of the growth of GaAs on GaAs(111)A

Surface Science ◽

10.1016/0039-6028(94)90546-0 ◽

1994 ◽

Vol 315 (1-2) ◽

pp. 105-111 ◽

Author(s):

K. Sato ◽

M.R. Fahy ◽

B.A. Joyce

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Layer‐by‐layer sublimation observed by reflection high‐energy electron diffraction intensity oscillation in a molecular beam epitaxy system

Applied Physics Letters ◽

10.1063/1.96194 ◽

1985 ◽

Vol 47 (3) ◽

pp. 286-288 ◽

Author(s):

Takeshi Kojima ◽

Naoyuki J. Kawai ◽

Tadashi Nakagawa ◽

Kimihiro Ohta ◽

Tsunenori Sakamoto ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

Layer By Layer ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation ◽

Molecular Beam Epitaxy System

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Reflection high-energy electron diffraction intensity oscillation study of Ga desorption from molecular beam epitaxially grown AlxGa1−xAs

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583383 ◽

1986 ◽

Vol 4 (2) ◽

pp. 594 ◽

Author(s):

J. Ralston

Keyword(s):

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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Reflection High-Energy Electron Diffraction Intensity Oscillation — An Effective Tool of Si and GexSi1-x Molecular Beam Epitaxy

Thin Film Growth Techniques for Low-Dimensional Structures - NATO ASI Series ◽

10.1007/978-1-4684-9145-6_13 ◽

1987 ◽

pp. 225-245

Author(s):

Tsunenori Sakamoto ◽

Kunihiro Sakamoto ◽

Satoru Nagao ◽

Gen Hashiguchi ◽

Katsuya Kuniyoshi ◽

...

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Diffraction Intensity ◽

Intensity Oscillation

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