Mechanisms for Enhanced Formation of the C54 Phase of Titanium Silicide Ultra-Large-Scale Integration Contacts
2000 ◽
Vol 30
(1)
◽
pp. 523-543
◽
2016 ◽
Vol 136
(12)
◽
pp. 864-875
◽
Keyword(s):
2013 ◽
Vol 21
(12)
◽
pp. 2358-2358
Keyword(s):