Micro-Raman Characterization of Cluster Carbon Implanted Si before and after Rapid Thermal Annealing

2016 ◽  
Vol 75 (8) ◽  
pp. 605-613
Author(s):  
W. S. Yoo ◽  
K. Kang ◽  
H. Nishigaki ◽  
N. Hasuike ◽  
H. Harima ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Before And After ◽  
Raman Characterization

Micro-Raman characterization of Ge diffusion and Si stress change in thin epitaxial Si1−xGex layers on Si(100) after rapid thermal annealing

2012 ◽  
Vol 27 (9) ◽  
pp. 1314-1323 ◽  
Author(s):  
Chun-Wei Chang ◽  
Min-Hao Hong ◽  
Wei-Fan Lee ◽  
Kuan-Ching Lee ◽  
Li-De Tseng ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Stress Change ◽  
Image Position ◽  
Raman Characterization

Abstract

X-ray electrono-optical and SIMS characterization of Si crystals implanted with Bi ions before and after rapid thermal annealing

1995 ◽  
Vol 30 (1) ◽  
pp. 129-133 ◽  
Author(s):  
J. Auleytner ◽  
J. Adamczewska ◽  
A. Barcz ◽  
J. Górecka ◽  
K. Regiński
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
X Ray ◽  
Before And After

Multi-Wavelength Raman and Photoluminescence Characterization of Implanted Silicon Before and After Rapid Thermal Annealing

2011 ◽  
Author(s):  
Woo Sik Yoo ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang ◽  
Jiro Matsuo ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Before And After ◽  
Multi Wavelength

scholarly journals Raman Characterization of SiGe Nanostructures Formed by Rapid Thermal Annealing

2009 ◽  
Vol 7 ◽  
pp. 301-306
Author(s):  
Alexandre Miranda P. dos Anjos ◽  
Ioshiaki Doi ◽  
Jose Alexandre Diniz
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Raman Characterization

Characterization of Ge nanocrystals in a-SiO2 synthesized by rapid thermal annealing

1999 ◽  
Vol 144-145 ◽  
pp. 697-701 ◽  
Author(s):  
W.K Choi ◽  
S Kanakaraju ◽  
Z.X Shen ◽  
W.S Li
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Ge Nanocrystals

Characterization of the TiW‐GaAs interface after rapid thermal annealing

1989 ◽  
Vol 66 (10) ◽  
pp. 4775-4779 ◽  
Author(s):  
M. de Potter ◽  
W. De Raedt ◽  
M. Van Hove ◽  
G. Zou ◽  
H. Bender ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing
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