Carbon Enhancement of SiO[sub 2] Nucleation in Buried Oxide Synthesis Computer Simulations and Secondary Ion Mass Spectroscopy Depth Profiling
2001 ◽
Vol 148
(5)
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pp. F92
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1996 ◽
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pp. 287
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2004 ◽
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pp. 292
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Vol 15
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2021 ◽
Vol 39
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pp. 033204
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