Surface Free Energy Model of Silicon Anisotropic Etching
1993 ◽
Vol 140
(4)
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pp. 1080-1085
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Keyword(s):
2003 ◽
Vol 6
(4)
◽
pp. 235-241
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Keyword(s):
1980 ◽
Vol 1
(2)
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pp. 139-149
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Keyword(s):
Keyword(s):
2017 ◽
Vol 393
◽
pp. 364-368
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Keyword(s):
1994 ◽
Vol 169
(4)
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pp. 323-326
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Keyword(s):
Keyword(s):
2007 ◽
Vol 44
(3-4)
◽
pp. 1196-1209
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Keyword(s):
2007 ◽
Vol 371
(5)
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pp. 1405-1419
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Keyword(s):
2004 ◽
Vol 126
(51)
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pp. 16736-16737
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2006 ◽
Vol 76
(1)
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pp. 156-162
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