Observation of Crystalline Imperfections in Supercritical Thickness Strained Silicon on Insulator Wafers by Synchrotron X-ray Topography
Keyword(s):
1992 ◽
Vol 10
(4)
◽
pp. 1006-1011
◽
2005 ◽
Vol 44
(4B)
◽
pp. 2336-2339
◽