Raman Microscopy and Scanning Surface Potential Microscopy Analysis of Nanoscale Defects on Si Wafer Surfaces

2009 ◽  
Vol 156 (6) ◽  
pp. H475 ◽  
Author(s):  
Takayuki Homma ◽  
Masahiro Kato ◽  
Nobuhiro Kubo ◽  
Kaoruho Sakata ◽  
Masahiro Yanagisawa
Keyword(s):  
Surface Potential ◽  
Raman Microscopy ◽  
Microscopy Analysis ◽  
Scanning Surface Potential Microscopy ◽  
Wafer Surfaces ◽  
Si Wafer

Scanning Surface Potential Microscopy

2012 ◽  
pp. 2293-2293
Author(s):  
Yimei Zhu ◽  
Hiromi Inada ◽  
Achim Hartschuh ◽  
Li Shi ◽  
Ada Della Pia ◽  
...  
Keyword(s):  
Surface Potential ◽  
Scanning Surface Potential Microscopy

Removal efficiency of organic contaminants on Si wafer surfaces by the N2O ECR plasma technique

2005 ◽  
Vol 91 (2-3) ◽  
pp. 490-493 ◽  
Author(s):  
Dae Kyu Kim ◽  
Yun Kyu Park ◽  
Subhayan Biswas ◽  
Chongmu Lee
Keyword(s):  
Removal Efficiency ◽  
Organic Contaminants ◽  
Ecr Plasma ◽  
Plasma Technique ◽  
Wafer Surfaces ◽  
Si Wafer

scholarly journals Surface resistivity estimation by scanning surface potential microscopy

2008 ◽  
Vol 79 (6) ◽  
pp. 066101 ◽  
Author(s):  
Z. Rakocevic ◽  
N. Popovic ◽  
Z. Bogdanov ◽  
B. Goncic ◽  
S. Strbac
Keyword(s):  
Surface Potential ◽  
Surface Resistivity ◽  
Scanning Surface Potential Microscopy

Electrical behavior of isolated multiwall carbon nanotubes characterized by scanning surface potential microscopy

2002 ◽  
Vol 81 (3) ◽  
pp. 541-543 ◽  
Author(s):  
S. B. Schujman ◽  
R. Vajtai ◽  
S. Biswas ◽  
B. Dewhirst ◽  
L. J. Schowalter ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Surface Potential ◽  
Multiwall Carbon Nanotubes ◽  
Electrical Behavior ◽  
Scanning Surface Potential Microscopy ◽  
Multiwall Carbon

Round robin determination of power spectral densities of different Si wafer surfaces

1998 ◽  
Author(s):  
Egon Marx ◽  
Igor J. Malik ◽  
Yale E. Strausser ◽  
Thomas C. Bristow ◽  
Noel S. Poduje ◽  
...  
Keyword(s):  
Round Robin ◽  
Spectral Densities ◽  
Power Spectral ◽  
Power Spectral Densities ◽  
Wafer Surfaces ◽  
Si Wafer

Power spectral densities: A multiple technique study of different Si wafer surfaces

2002 ◽  
Vol 20 (1) ◽  
pp. 31 ◽  
Author(s):  
Egon Marx ◽  
Igor J. Malik ◽  
Yale E. Strausser ◽  
Thomas Bristow ◽  
Noel Poduje ◽  
...  
Keyword(s):  
Spectral Densities ◽  
Power Spectral ◽  
Power Spectral Densities ◽  
Wafer Surfaces ◽  
Si Wafer
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