Ultraviolet (UV) light plays an important role in air/water/surface sterilization now. Maintaining a certain light intensity is often required to attain the targeted effect. In this paper, on-chip power monitoring of a UV-A light-emitting diode (LED) via sapphire substrate is reported. A p–i–n photodiode loop that surrounds the UV-A LED was designed and fabricated to monitor the output power by detecting the scattered light of the LED propagating through the sapphire substrate. No particular waveguide structure or processing parameter control was needed. The monitoring responsivities per unit of surface-emitting power obtained were approximately 21 and 25 mA/W at photodiode biases of 0 and 3 V, respectively. When combined with a transimpedance amplifier, a monitoring responsivity of 1.87 V/mW at zero bias was measured, and a different monitoring responsivity could be customized by adjusting the gain of the transimpedance amplifier. The operation principle of this device might be applicable to UV-B or UV-C LEDs.
Output Power Monitoring of Ultraviolet Light-Emitting Diode via Sapphire Substrate
