Diffusion-Reaction Model of ALD in Nanostructured Substrates: Analytic Approximations to Dose Times as a Function of the Surface Reaction Probability
2006 ◽
Vol 57
(15)
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pp. 4215-4224
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2014 ◽
pp. 639-648
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2013 ◽
Vol 90
(9)
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pp. 1915-1937
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1995 ◽
Vol 42
(11)
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pp. 1903-1911
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1990 ◽
Vol 1
(1-6)
◽
pp. 166-170
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Keyword(s):
2021 ◽