Optimization of Slurry and Technological Parameter on Chemical Mechanical Polishing of Titanium Dioxide Film for IC

2019 ◽  
Vol 44 (1) ◽  
pp. 519-524 ◽  
Author(s):  
Jun Ren ◽  
Kailiang Zhang ◽  
Fang Wang ◽  
Taofeng Zhang ◽  
Yujie Yuan
2017 ◽  
Vol 59 (1) ◽  
pp. 81-85
Author(s):  
Jianjun Zhang ◽  
Hao Zeng ◽  
Chun Liu ◽  
Chao Li ◽  
Sude Ma ◽  
...  

2016 ◽  
Vol 65 ◽  
pp. 5-8 ◽  
Author(s):  
Takuma Hachisu ◽  
Kazuaki Shi ◽  
Tokihiko Yokoshima ◽  
Atsushi Sugiyama ◽  
Shigeki Kuroiwa ◽  
...  

1995 ◽  
Vol 34 (31) ◽  
pp. 7355 ◽  
Author(s):  
Shu-Chung Chiao ◽  
Bertrand G. Bovard ◽  
H. A. Macleod

Nanomaterials ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 1598
Author(s):  
Qiang Zhang ◽  
Shengwen Hou ◽  
Chaoyang Li

Well-arrayed zinc oxide nanorods applied as photoelectrodes for dye-sensitized solar cells were synthesized on an aluminum-doped zinc oxide substrate by the multi-annealing method. In order to improve the chemical stability and surface-to-volume ratio of photoanodes in dye-sensitized solar cells, the synthesized zinc oxide nanorods were coated with pure anatase phase titanium dioxide film using a novel mist chemical vapor deposition method. The effects of the titanium dioxide film on the morphological, structural, optical, and photovoltaic properties of zinc oxide–titanium dioxide core–shell nanorods were investigated. It was found that the diameter and surface-to-volume ratio of zinc oxide nanorods were significantly increased by coating them with titanium dioxide thin film. The power conversion efficiency of dye-sensitized solar cells was improved from 1.31% to 2.68% by coating titanium dioxide film onto the surface of zinc oxide nanorods.


2012 ◽  
Vol 531 ◽  
pp. 403-406 ◽  
Author(s):  
Sheng Min Sun

In pure titanium body, through the method of micro-arc oxidation (MAO) on the surface of porous titanium dioxide film and study on factors of methyl orange in the light influence of catalytic degradation process, the results show that: with uv light for the source, pH value of 5, micro-arc oxidation voltage is 400 V, the catalytic activity of porous titanium dioxide film was the highest.


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