Recycling SiC Focus Rings for Reactive Ion Etching Equipment by Insertless Diffusion Bonding using Hot Isostatic Pressing
2020 ◽
Vol 9
(12)
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pp. 124006
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2009 ◽
Vol 386-388
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pp. 550-552
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2020 ◽
Vol 35
(1)
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pp. 183-191
Keyword(s):
2007 ◽
Vol 192-193
◽
pp. 453-458
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2011 ◽
Vol 678
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pp. 145-154
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