Erbium Incorporation in Yttrium Oxide Thin Films by Radical-enhanced
Atomic Layer Deposition
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2004 ◽
Vol 374
(1-2)
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pp. 124-128
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2014 ◽
Vol 20
(7-8-9)
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pp. 217-223
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2016 ◽
Vol 32
(1)
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pp. 37-44
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2018 ◽
Vol 36
(6)
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pp. 06A104