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Characterization of High-k Gate Dielectric Stacks on Silicon and High Mobility Substrates
ECS Meeting Abstracts
◽
10.1149/ma2008-02/25/1938
◽
2008
◽
Keyword(s):
Gate Dielectric
◽
High Mobility
◽
High K
◽
High K Gate Dielectric
Download Full-text
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Cited By
References
Characterization of high-k gate dielectric/silicon interfaces
Applied Surface Science
◽
10.1016/s0169-4332(01)00841-8
◽
2002
◽
Vol 190
(1-4)
◽
pp. 66-74
◽
Cited By ~ 107
Author(s):
Seiichi Miyazaki
Keyword(s):
Gate Dielectric
◽
High K
◽
High K Gate Dielectric
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High Mobility Strained Ge MOSFETs with high-k gate dielectric on Si
2005 International Semiconductor Device Research Symposium
◽
10.1109/isdrs.2005.1596025
◽
2006
◽
Author(s):
J.P. Donnelly
◽
D.Q. Kelly
◽
S. Joshi
◽
S. Dey
◽
D. Shahrjerdi
◽
...
Keyword(s):
Gate Dielectric
◽
High Mobility
◽
High K
◽
High K Gate Dielectric
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Characterization of high-k gate dielectric films using SIMS
Applied Surface Science
◽
10.1016/s0169-4332(02)00725-0
◽
2003
◽
Vol 203-204
◽
pp. 516-519
◽
Cited By ~ 7
Author(s):
T. Yamamoto
◽
N. Morita
◽
N. Sugiyama
◽
A. Karen
◽
K. Okuno
Keyword(s):
Gate Dielectric
◽
Dielectric Films
◽
High K
◽
High K Gate Dielectric
Download Full-text
Growth and characterization of HfO2 high-k gate dielectric films by laser molecular beam epitaxy (LMBE)
Journal of Materials Science Materials in Electronics
◽
10.1007/s10854-006-0014-3
◽
2006
◽
Vol 17
(9)
◽
pp. 685-688
◽
Cited By ~ 2
Author(s):
Y. K. Lu
◽
X. F. Chen
◽
W. Zhu
◽
R. Gopalkrishnan
Keyword(s):
Molecular Beam Epitaxy
◽
Molecular Beam
◽
Gate Dielectric
◽
Dielectric Films
◽
Laser Molecular Beam Epitaxy
◽
High K
◽
High K Gate Dielectric
Download Full-text
Observation and characterization of defects in HfO2 high-K gate dielectric layers
Microelectronics Reliability
◽
10.1016/j.microrel.2004.11.045
◽
2005
◽
Vol 45
(5-6)
◽
pp. 798-801
◽
Cited By ~ 4
Author(s):
Vidya Kaushik
◽
Martine Claes
◽
Annelies Delabie
◽
Sven Van Elshocht
◽
Olivier Richard
◽
...
Keyword(s):
Gate Dielectric
◽
Dielectric Layers
◽
High K
◽
High K Gate Dielectric
Download Full-text
Physical characterization of high-k gate dielectric film systems processed by RTA and spike anneal
10th IEEE International Conference of Advanced Thermal Processing of Semiconductors
◽
10.1109/rtp.2002.1039445
◽
2003
◽
Author(s):
P.S. Lyaaght
◽
B. Foran
◽
G. Bersuker
◽
R. Tichy
◽
L. Larson
◽
...
Keyword(s):
Gate Dielectric
◽
Dielectric Film
◽
Physical Characterization
◽
High K
◽
Spike Anneal
◽
High K Gate Dielectric
Download Full-text
Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs
Journal of Electronic Materials
◽
10.1007/s11664-013-2754-1
◽
2013
◽
Vol 43
(1)
◽
pp. 151-154
◽
Cited By ~ 11
Author(s):
Derek W. Johnson
◽
Jung Hwan Yum
◽
Todd W. Hudnall
◽
Ryan M. Mushinski
◽
Christopher W. Bielawski
◽
...
Keyword(s):
Gate Dielectric
◽
Beryllium Oxide
◽
Low Leakage
◽
High K
◽
High K Gate Dielectric
Download Full-text
Characterization of High-k Gate Dielectric with Amorphous Nanostructure
Journal of Electronic Materials
◽
10.1007/s11664-013-2772-z
◽
2013
◽
Vol 42
(12)
◽
pp. 3529-3540
◽
Cited By ~ 7
Author(s):
Ali Bahari
◽
Reza Gholipur
Keyword(s):
Gate Dielectric
◽
High K
◽
High K Gate Dielectric
Download Full-text
Growth and characterization of Hf–aluminate high-k gate dielectric ultrathin films with equivalent oxide thickness less than 10 Å
Journal of Applied Physics
◽
10.1063/1.1554764
◽
2003
◽
Vol 93
(6)
◽
pp. 3665-3667
◽
Cited By ~ 47
Author(s):
P. F. Lee
◽
J. Y. Dai
◽
K. H. Wong
◽
H. L. W. Chan
◽
C. L. Choy
Keyword(s):
Ultrathin Films
◽
Gate Dielectric
◽
Oxide Thickness
◽
Equivalent Oxide Thickness
◽
High K
◽
High K Gate Dielectric
Download Full-text
Electrical Characterization of Capacitors with AVD-Deposited Hafnium Silicates as High-k Gate Dielectric
Journal of The Electrochemical Society
◽
10.1149/1.2041067
◽
2005
◽
Vol 152
(11)
◽
pp. F185
◽
Cited By ~ 14
Author(s):
S. Van Elshocht
◽
U. Weber
◽
T. Conard
◽
V. Kaushik
◽
M. Houssa
◽
...
Keyword(s):
Gate Dielectric
◽
Electrical Characterization
◽
High K
◽
High K Gate Dielectric
Download Full-text
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