Observation and characterization of defects in HfO2 high-K gate dielectric layers

2005 ◽  
Vol 45 (5-6) ◽  
pp. 798-801 ◽  
Author(s):  
Vidya Kaushik ◽  
Martine Claes ◽  
Annelies Delabie ◽  
Sven Van Elshocht ◽  
Olivier Richard ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Dielectric Layers ◽  
High K ◽  
High K Gate Dielectric

Characterization of high-k gate dielectric films using SIMS

2003 ◽  
Vol 203-204 ◽  
pp. 516-519 ◽  
Author(s):  
T. Yamamoto ◽  
N. Morita ◽  
N. Sugiyama ◽  
A. Karen ◽  
K. Okuno
Keyword(s):  
Gate Dielectric ◽  
Dielectric Films ◽  
High K ◽  
High K Gate Dielectric

Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide

2007 ◽  
Vol 91 (8) ◽  
pp. 082904 ◽  
Author(s):  
Annelies Delabie ◽  
Florence Bellenger ◽  
Michel Houssa ◽  
Thierry Conard ◽  
Sven Van Elshocht ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Germanium Oxide ◽  
Dielectric Layers ◽  
High K ◽  
High K Gate Dielectric

Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs

2013 ◽  
Vol 43 (1) ◽  
pp. 151-154 ◽  
Author(s):  
Derek W. Johnson ◽  
Jung Hwan Yum ◽  
Todd W. Hudnall ◽  
Ryan M. Mushinski ◽  
Christopher W. Bielawski ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Beryllium Oxide ◽  
Low Leakage ◽  
High K ◽  
High K Gate Dielectric

Electrical Characterization of Capacitors with AVD-Deposited Hafnium Silicates as High-k Gate Dielectric

2005 ◽  
Vol 152 (11) ◽  
pp. F185 ◽  
Author(s):  
S. Van Elshocht ◽  
U. Weber ◽  
T. Conard ◽  
V. Kaushik ◽  
M. Houssa ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Electrical Characterization ◽  
High K ◽  
High K Gate Dielectric
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