Characterization of high-k gate dielectric films using SIMS

2003 ◽  
Vol 203-204 ◽  
pp. 516-519 ◽  
Author(s):  
T. Yamamoto ◽  
N. Morita ◽  
N. Sugiyama ◽  
A. Karen ◽  
K. Okuno
Keyword(s):  
Gate Dielectric ◽  
Dielectric Films ◽  
High K ◽  
High K Gate Dielectric

scholarly journals Fabrication and properties of the Y-doped Al2O3 high-k gate dielectric films

2005 ◽  
Vol 54 (12) ◽  
pp. 5901
Author(s):  
Guo De-Feng ◽  
Geng Wei-Gang ◽  
Lan Wei ◽  
Huang Chun-Ming ◽  
Wang Yin-Yue
Keyword(s):  
Gate Dielectric ◽  
Dielectric Films ◽  
High K ◽  
High K Gate Dielectric

scholarly journals High-k Gate Dielectric Films Studied by Extremely Asymmetric X-ray Diffraction and X-ray Photoelectron Spectroscopy

2007 ◽  
Vol 83 ◽  
pp. 012011 ◽  
Author(s):  
Yuki Ito ◽  
Koichi Akimoto ◽  
Hironori Yoshida ◽  
Takashi Emoto ◽  
Daisuke Kobayashi ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Gate Dielectric ◽  
Dielectric Films ◽  
X Ray Diffraction ◽  
X Ray ◽  
High K ◽  
High K Gate Dielectric

Observation and characterization of defects in HfO2 high-K gate dielectric layers

2005 ◽  
Vol 45 (5-6) ◽  
pp. 798-801 ◽  
Author(s):  
Vidya Kaushik ◽  
Martine Claes ◽  
Annelies Delabie ◽  
Sven Van Elshocht ◽  
Olivier Richard ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Dielectric Layers ◽  
High K ◽  
High K Gate Dielectric

Characterization of ALD Beryllium Oxide as a Potential High-k Gate Dielectric for Low-Leakage AlGaN/GaN MOSHEMTs

2013 ◽  
Vol 43 (1) ◽  
pp. 151-154 ◽  
Author(s):  
Derek W. Johnson ◽  
Jung Hwan Yum ◽  
Todd W. Hudnall ◽  
Ryan M. Mushinski ◽  
Christopher W. Bielawski ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Beryllium Oxide ◽  
Low Leakage ◽  
High K ◽  
High K Gate Dielectric

Mixed Oxides as High-k Gate Dielectric Films

2019 ◽  
Vol 2 (1) ◽  
pp. 13-22 ◽  
Author(s):  
Rosa María Luna-Sánchez ◽  
Ignacio González-Martínez
Keyword(s):  
Gate Dielectric ◽  
Mixed Oxides ◽  
Dielectric Films ◽  
High K ◽  
High K Gate Dielectric
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