Phase-Change InSbTe Nanowires Grown in Situ at Low Temperature by Metal−Organic Chemical Vapor Deposition

Nano Letters ◽

10.1021/nl903188z ◽

2010 ◽

Vol 10 (2) ◽

pp. 472-477 ◽

Author(s):

Jun-Ku Ahn ◽

Kyoung-Woo Park ◽

Hyun-June Jung ◽

Soon-Gil Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Phase Change ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Growth of Heavily Doped n-Ge Epitaxial Layer by In situ Phosphorus-doping with Low-temperature Metal-Organic Chemical Vapor Deposition

10.7567/ssdm.2016.ps-1-02 ◽

2016 ◽

Author(s):

S. Ike ◽

W. Takeuchi ◽

O. Nakatsuka ◽

S. Zaima

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Phosphorus Doping ◽

Metal Organic ◽

Heavily Doped ◽

Organic Chemical Vapor Deposition

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In situ growth of highly oriented Pb(Zr0.5Ti0.5)O3 thin films by low-temperature metal–organic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.121118 ◽

1998 ◽

Vol 72 (13) ◽

pp. 1572-1574 ◽

Author(s):

G.-R. Bai ◽

I-Fei Tsu ◽

A. Wang ◽

C. M. Foster ◽

C. E. Murray ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

In Situ Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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In-situ growth of Pb(Zr0.5Ti0.5)O3/RuO2heterostructures on Si(001) using low-temperature metal-organic chemical vapor deposition

Integrated Ferroelectrics ◽

10.1080/10584589708019973 ◽

1997 ◽

Vol 14 (1-4) ◽

pp. 23-31 ◽

Author(s):

C. M. Foster ◽

G.-R. Bai ◽

A. Wang ◽

J. Vetrone ◽

Y. Huang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

In Situ Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.08.030 ◽

2007 ◽

Vol 515 (5) ◽

pp. 2921-2925 ◽

Author(s):

Chunyu Wang ◽

Volker Cimalla ◽

Genady Cherkashinin ◽

Henry Romanus ◽

Majdeddin Ali ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Indium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Metal-organic chemical vapor deposition of quasi-normally-off AlGaN/GaN field-effect transistors on silicon substrates using low-temperature grown AlN cap layers

Applied Physics Letters ◽

10.1063/1.3475394 ◽

2010 ◽

Vol 97 (5) ◽

pp. 053502 ◽

Author(s):

S. Tan ◽

S. L. Selvaraj ◽

T. Egawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Field Effect ◽

Field Effect Transistors ◽

Chemical Vapor ◽

Organic Chemical ◽

Silicon Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition

ACS Nano ◽

10.1021/acsnano.1c00811 ◽

2021 ◽

Author(s):

Minsoo Kang ◽

Hyun-Jun Chai ◽

Han Beom Jeong ◽

Cheolmin Park ◽

In-young Jung ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

High Quality ◽

Layered Semiconductors ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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S/Mo ratio and petal size controlled MoS2 nanoflowers with low temperature metal organic chemical vapor deposition and their application in solar cells

Nanotechnology ◽

10.1088/1361-6528/abe32c ◽

2021 ◽

Vol 32 (19) ◽

pp. 195206

Author(s):

Jaeseo Park ◽

Hyeji Park ◽

Suho Park ◽

Nguyen Thi Thuy ◽

Jihun Mun ◽

...

Keyword(s):

Solar Cells ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Size Controlled

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Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590703 ◽

1999 ◽

Vol 17 (3) ◽

pp. 1101 ◽

Author(s):

Jean E. Kelsey ◽

Cindy Goldberg ◽

Guillermo Nuesca ◽

Gregory Peterson ◽

Alain E. Kaloyeros ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Diffusion Barrier ◽

Vapor Deposition ◽

Chemical Vapor ◽

Copper Metallization ◽

Organic Chemical ◽

Tungsten Nitride ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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In situ oxidation for stabilization of Fe/MCM-41 catalyst prepared by metal organic chemical vapor deposition

Catalysis Communications ◽

10.1016/j.catcom.2007.02.009 ◽

2007 ◽

Vol 8 (11) ◽

pp. 1719-1723 ◽

Author(s):

Frank L.Y. Lam ◽

Xijun Hu

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

In Situ Oxidation ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

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Low temperature metal-organic chemical vapor deposition of advanced barrier layers for the microelectronics industry

Thin Solid Films ◽

10.1016/0040-6090(94)90479-0 ◽

1994 ◽

Vol 247 (1) ◽

pp. 85-93 ◽

Author(s):

Ivo J. Raaijmakers

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Barrier Layers ◽

Metal Organic ◽

Microelectronics Industry ◽

Organic Chemical Vapor Deposition

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