The Use of Low Pressure Chemical Vapor Deposition for 3D Integrated
Thin-Film Microbatteries
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1992 ◽
Vol 39
(3)
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pp. 598-606
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1997 ◽
Vol 144
(4)
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pp. 1423-1429
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1993 ◽
Vol 11
(4)
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pp. 1287
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1990 ◽
Vol 137
(4)
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pp. 1288-1296
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