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(Invited) Processing of 2D Materials Using Ultra-Low Energy Ion Implantation
ECS Meeting Abstracts
◽
10.1149/ma2021-0114656mtgabs
◽
2021
◽
Vol MA2021-01
(14)
◽
pp. 656-656
Author(s):
Lino M.C. Pereira
Keyword(s):
Ion Implantation
◽
2D Materials
◽
Low Energy
Download Full-text
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References
New Single Photon Sources by Optoelectronic Tailoring of 2D Materials using Low Energy Ion Implantation
10.22443/rms.emc2020.428
◽
2021
◽
Author(s):
Michael Hennessy
◽
Keyword(s):
Ion Implantation
◽
Single Photon
◽
2D Materials
◽
Low Energy
◽
Photon Sources
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Sputter hot filament hollow cathode ion source and its application to ultra-low energy ion implantation in 2D materials
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
◽
10.1016/j.nimb.2021.10.017
◽
2022
◽
Vol 510
◽
pp. 63-68
Author(s):
Felix Junge
◽
Manuel Auge
◽
Hans Hofsäss
Keyword(s):
Ion Implantation
◽
Hollow Cathode
◽
2D Materials
◽
Ion Source
◽
Low Energy
◽
Hot Filament
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New Single Photon Sources by Optoelectronic Tailoring of 2D Materials Using Low Energy Ion Implantation
Microscopy and Microanalysis
◽
10.1017/s143192762002293x
◽
2020
◽
Vol 26
(S2)
◽
pp. 2832-2833
Author(s):
Michael Hennessy
◽
Eoghan O'Connell
◽
Stefan Rost
◽
Manuel Auge
◽
Eoin Moynihan
◽
...
Keyword(s):
Ion Implantation
◽
Single Photon
◽
2D Materials
◽
Low Energy
◽
Photon Sources
Download Full-text
Special Aspects of High-Intensity Low-Energy Ion Implantation
Russian Physics Journal
◽
10.1007/s11182-021-02238-0
◽
2021
◽
Author(s):
A. I. Ryabchikov
◽
A. I. Ivanova
◽
O. S. Korneva
◽
D. O. Sivin
Keyword(s):
Ion Implantation
◽
High Intensity
◽
Low Energy
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Analysis of ultrashallow doping profiles obtained by low energy ion implantation
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.588458
◽
1996
◽
Vol 14
(1)
◽
pp. 260
◽
Cited By ~ 14
Author(s):
K. B. Parab
Keyword(s):
Ion Implantation
◽
Low Energy
◽
Doping Profiles
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Big channeling effects at low-energy ion implantation in silicon
phys stat sol (a)
◽
10.1002/pssa.2210970247
◽
1986
◽
Vol 97
(2)
◽
pp. K135-K139
◽
Cited By ~ 5
Author(s):
J. Bollmann
◽
H. Klose
◽
A. Mertens
Keyword(s):
Ion Implantation
◽
Low Energy
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Conducting polymer formed by low energy gold ion implantation
Applied Physics Letters
◽
10.1063/1.2973161
◽
2008
◽
Vol 93
(7)
◽
pp. 073102
◽
Cited By ~ 35
Author(s):
M. C. Salvadori
◽
M. Cattani
◽
F. S. Teixeira
◽
I. G. Brown
Keyword(s):
Ion Implantation
◽
Conducting Polymer
◽
Low Energy
◽
Gold Ion
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Engineering of gentiopicroside-producing yeast strain using low-energy ion implantation mediated synthetic biology
Biotechnology & Biotechnological Equipment
◽
10.1080/13102818.2016.1175320
◽
2016
◽
Vol 30
(4)
◽
pp. 805-812
Author(s):
Ting Wang
◽
Weidong Qian
◽
Yunfang Fu
◽
Changlong Cai
◽
Peihong Mao
Keyword(s):
Synthetic Biology
◽
Ion Implantation
◽
Yeast Strain
◽
Low Energy
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Optimization of L(+)-Lactic Acid Fermentation Without Neutralisation of Rhizopus Oryzae Mutant RK02 by Low-Energy Ion Implantation
Plasma Science and Technology
◽
10.1088/1009-0630/10/2/25
◽
2008
◽
Vol 10
(2)
◽
pp. 260-264
◽
Cited By ~ 1
Author(s):
Li Wen
◽
Wang Tao
◽
Yang Yingge
◽
Liu Dan
◽
Fan Yonghong
◽
...
Keyword(s):
Lactic Acid
◽
Ion Implantation
◽
Rhizopus Oryzae
◽
Lactic Acid Fermentation
◽
Low Energy
◽
Acid Fermentation
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Charge trapping and retention behaviors of Ge nanocrystals distributed in the gate oxide near the gate synthesized by low-energy ion implantation
Journal of Applied Physics
◽
10.1063/1.2749470
◽
2007
◽
Vol 101
(12)
◽
pp. 124313
◽
Cited By ~ 14
Author(s):
M. Yang
◽
T. P. Chen
◽
J. I. Wong
◽
C. Y. Ng
◽
Y. Liu
◽
...
Keyword(s):
Ion Implantation
◽
Charge Trapping
◽
Gate Oxide
◽
Low Energy
◽
Ge Nanocrystals
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