Layer Thickness Determination of Thin Films by Grazing Incidence X-Ray Experiments using Interference Effect
1991 ◽
Vol 35
(B)
◽
pp. 813-818
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Keyword(s):
X Ray
◽
AbstractA novel method using Fourier transform algorithm is proposed to determine each layer thickness of multi-layered thin films from interference oscillation observed in X-ray specular reflection. The peak position in Fourier space gives each layer thickness of the film. The principle of the present technique as well as its applications are described.