Fabrication of AlN Nano-Structures Using Polarity Control by High Temperature Metalorganic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2015.10368 ◽

2015 ◽

Vol 15 (7) ◽

pp. 5144-5147 ◽

Author(s):

Daeyong Eom ◽

Jinwan Kim ◽

Kyungjae Lee ◽

Minhwan Jeon ◽

Cheon Heo ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Nano Structures ◽

Metalorganic Chemical

Download Full-text

Heteroepitaxial AlN growth 4on c-plane sapphire substrates by ammonia-free high temperature metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2021.126496 ◽

2022 ◽

pp. 126496

Author(s):

Xu-Qiang Shen ◽

Kazutoshi Kojima

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Sapphire Substrates ◽

Metalorganic Chemical

Download Full-text

Reduced thermal budget processing of Y–Ba–Cu–O high temperature superconducting thin films by metalorganic chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577421 ◽

1991 ◽

Vol 9 (3) ◽

pp. 401-404 ◽

Author(s):

R. Singh ◽

S. Sinha ◽

N. J. Hsu ◽

J. T. C. Ng ◽

P. Chou ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

Thermal Budget ◽

High Temperature Superconducting ◽

Metalorganic Chemical

Download Full-text

Plasma-Enhanced Metalorganic Chemical Vapor Deposition for High Temperature Superconducting Thin Film

Materials Science Forum ◽

10.4028/www.scientific.net/msf.140-142.457 ◽

1993 ◽

Vol 140-142 ◽

pp. 457-464

Author(s):

Kenji Ebihara ◽

Tomoaki Ikegami

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Film ◽

High Temperature Superconducting ◽

Metalorganic Chemical

Download Full-text

High Quality Al-Polar AlN Growth on (0001) Sapphire Using Polarity-Selective Thermal Etching by High Temperature Metalorganic Chemical Vapor Deposition

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2015.11446 ◽

2015 ◽

Vol 15 (11) ◽

pp. 8401-8406

Author(s):

Minhwan Jeon ◽

Jinwan Kim ◽

Kyungjae Lee ◽

Daeyong Eom ◽

Jaedo Pyeon ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

High Quality ◽

Thermal Etching ◽

Metalorganic Chemical

Download Full-text

Effect of high-temperature buffer thickness on quality of AlN epilayer grown on sapphire substrate by metalorganic chemical vapor deposition

Chinese Physics B ◽

10.1088/1674-1056/22/5/057105 ◽

2013 ◽

Vol 22 (5) ◽

pp. 057105 ◽

Author(s):

Bo Liu ◽

Sen Zhang ◽

Jia-Yun Yin ◽

Xiong-Wen Zhang ◽

Shao-Bo Dun ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Sapphire Substrate ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

Download Full-text

Initial stage of epitaxial growth at the high temperature of GaAs and AlGaAs on Si by metalorganic chemical vapor deposition

Applied Physics Letters ◽

10.1063/1.104354 ◽

1991 ◽

Vol 58 (11) ◽

pp. 1170-1172 ◽

Author(s):

T. Soga ◽

T. George ◽

T. Jimbo ◽

M. Umeno ◽

E. R. Weber

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Initial Stage ◽

Metalorganic Chemical

Download Full-text

A Review of Metalorganic Chemical Vapor Deposition of High-Temperature Superconducting Thin Films

10.1117/12.965153 ◽

1990 ◽

Author(s):

A. Erbil ◽

K. Zhang ◽

B. S. Kwak ◽

E. P. Boyd

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

High Temperature Superconducting ◽

Metalorganic Chemical

Download Full-text

Design and fabrication of a computer‐controlled rapid‐isothermal‐processing‐assisted metalorganic chemical‐vapor‐deposition system for high‐temperature superconducting thin films and related materials

Review of Scientific Instruments ◽

10.1063/1.1144225 ◽

1993 ◽

Vol 64 (2) ◽

pp. 514-523 ◽

Author(s):

R. Singh ◽

J. T. C. Ng ◽

S. Sinha ◽

V. Dhall

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Superconducting Thin Films ◽

Computer Controlled ◽

Rapid Isothermal Processing ◽

Metalorganic Chemical

Download Full-text

Zn-doped AlInAs grown at high temperature by metalorganic chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/s0022-0248(00)00844-7 ◽

2000 ◽

Vol 220 (4) ◽

pp. 393-400 ◽

Author(s):

K. Tateno ◽

C. Amano

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Metalorganic Chemical

Download Full-text

Model for the vaporization of mixed organometallic compounds in the metalorganic chemical vapor deposition of high temperature superconducting films

Applied Physics Letters ◽

10.1063/1.110621 ◽

1993 ◽

Vol 63 (14) ◽

pp. 1981-1983 ◽

Author(s):

Guangyao Meng ◽

Gang Zhou ◽

Roger L. Schneider ◽

Bimal K. Sarma ◽

Moises Levy

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Organometallic Compounds ◽

Superconducting Films ◽

High Temperature Superconducting ◽

Metalorganic Chemical

Download Full-text