Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells

Applied Surface Science ◽

10.1016/j.apsusc.2012.07.082 ◽

2012 ◽

Vol 259 ◽

pp. 596-599 ◽

Cited By ~ 9

Author(s):

Doo-Soo Kim ◽

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Kyeong-Ju Moon ◽

Myoungwoo Son ◽

...

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Deposition Temperature ◽

Thin Film Solar Cells ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Surface textured ZnO:Al thin films by pulsed DC magnetron sputtering for thin film solar cells applications

Applied Surface Science ◽

10.1016/j.apsusc.2010.08.001 ◽

2010 ◽

Vol 257 (3) ◽

pp. 960-968 ◽

Cited By ~ 56

Author(s):

W.T. Yen ◽

Y.C. Lin ◽

J.H. Ke

Keyword(s):

Thin Film ◽

Thin Films ◽

Solar Cells ◽

Magnetron Sputtering ◽

Thin Film Solar Cells ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Preparation of Ga-doped ZnO films by pulsed dc magnetron sputtering with cylindrical rotating target for thin film solar cell applications

Applied Surface Science ◽

10.1016/j.apsusc.2011.08.128 ◽

2011 ◽

Vol 258 (2) ◽

pp. 834-838 ◽

Cited By ~ 17

Author(s):

Beom-Ki Shin ◽

Tae-Il Lee ◽

Ji-Hyeon Park ◽

Kang-Il Park ◽

Kyung-Jun Ahn ◽

...

Keyword(s):

Thin Film ◽

Solar Cell ◽

Magnetron Sputtering ◽

Thin Film Solar Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering ◽

Rotating Target

Download Full-text

Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Effects of sputtering power toward the Al-doped ZnO thin Film prepared by pulsed DC magnetron sputtering

Materials Today Proceedings ◽

10.1016/j.matpr.2017.06.154 ◽

2017 ◽

Vol 4 (5) ◽

pp. 6466-6471 ◽

Cited By ~ 6

Author(s):

Kittikhun Seawsakul ◽

Mati Horprathum ◽

Pitak Eiamchai ◽

Viyapol Pattantsetakul ◽

Saksorn Limwichean ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Zno Thin Film ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Sputtering Power ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Characteristics of Ga-doped ZnO films deposited by pulsed DC magnetron sputtering at low temperature

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2013.07.026 ◽

2013 ◽

Vol 16 (6) ◽

pp. 1957-1963 ◽

Cited By ~ 9

Author(s):

Kyung-Jun Ahn ◽

Sanghun Lee ◽

Won-Jeong Kim ◽

Geun Young Yeom ◽

Woong Lee

Keyword(s):

Low Temperature ◽

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Ga-doped ZnO films deposited with varying sputtering powers and substrate temperatures by pulsed DC magnetron sputtering and their property improvement potentials

Applied Surface Science ◽

10.1016/j.apsusc.2012.03.073 ◽

2012 ◽

Vol 258 (17) ◽

pp. 6537-6544 ◽

Cited By ~ 22

Author(s):

Sanghun Lee ◽

Dongkeun Cheon ◽

Won-Jeong Kim ◽

Moon-Ho Ham ◽

Woong Lee

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering ◽

Substrate Temperatures

Download Full-text

Low-Temperature Deposition of Ga-Doped ZnO Films for Transparent Electrodes by Pulsed DC Magnetron Sputtering

Korean Journal of Materials Research ◽

10.3740/mrsk.2017.27.2.69 ◽

2017 ◽

Vol 27 (2) ◽

pp. 69-75 ◽

Cited By ~ 1

Author(s):

Dongkeun Cheon ◽

◽

Kyung-Jun Ahn ◽

Woong Lee

Keyword(s):

Low Temperature ◽

Magnetron Sputtering ◽

Zno Films ◽

Transparent Electrodes ◽

Dc Magnetron Sputtering ◽

Low Temperature Deposition ◽

Pulsed Dc ◽

Temperature Deposition ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

High Mobility Titanium-doped Indium Oxide for Use in Tandem Solar Cells Deposited via Pulsed DC Magnetron Sputtering

Energy Procedia ◽

10.1016/j.egypro.2014.12.357 ◽

2014 ◽

Vol 60 ◽

pp. 148-155 ◽

Cited By ~ 6

Author(s):

B. Grew ◽

J.W. Bowers ◽

F. Lisco ◽

N. Arnou ◽

J.M. Walls ◽

...

Keyword(s):

Solar Cells ◽

Magnetron Sputtering ◽

Indium Oxide ◽

High Mobility ◽

Dc Magnetron Sputtering ◽

Tandem Solar Cells ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

Download Full-text

Room temperature deposition of highly conductive and transparent hydrogen and tungsten co-doped ZnO films for thin film solar cells applications

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2012.12.008 ◽

2013 ◽

Vol 110 ◽

pp. 94-97 ◽

Cited By ~ 14

Author(s):

Yanfeng Wang ◽

Xiaodan Zhang ◽

Qian Huang ◽

Changchun Wei ◽

Ying Zhao

Keyword(s):

Thin Film ◽

Solar Cells ◽

Room Temperature ◽

Thin Film Solar Cells ◽

Zno Films ◽

Temperature Deposition ◽

Doped Zno ◽

Co Doped ◽

And Tungsten

Download Full-text

ZnO/ZnO:Al window and contact layer for thin film solar cells: high rate deposition by simultaneous RF and DC magnetron sputtering

Conference Record of the Twenty Fifth IEEE Photovoltaic Specialists Conference - 1996 ◽

10.1109/pvsc.1996.564269 ◽

1996 ◽

Author(s):

K. Ellimer ◽

R. Wendt ◽

R. Cebulla

Keyword(s):

Thin Film ◽

Solar Cells ◽

Magnetron Sputtering ◽

Contact Layer ◽

Thin Film Solar Cells ◽

High Rate ◽

Dc Magnetron Sputtering

Download Full-text