Piezoelectric Thin Films for MEMS Applications

MEMS ◽  
2017 ◽  
pp. 41-67
Author(s):  
Isaku Kanno
Keyword(s):  
Thin Films ◽  
Piezoelectric Thin Films

Integration and Optimisation of PZT Piezoelectric Thin Films in Micro and Nano Dimensional Structures

2009 ◽  
Vol 1 (3) ◽  
pp. 214-225 ◽  
Author(s):  
D. Remiens ◽  
C. Soyer ◽  
D. Troadec ◽  
D. Deresmes ◽  
D. Jenkins ◽  
...  
Keyword(s):  
Thin Films ◽  
Piezoelectric Thin Films

Self-polarized piezoelectric thin films: preparation, formation mechanism and application

2015 ◽  
Vol 3 (34) ◽  
pp. 8926-8931 ◽  
Author(s):  
Baozhang Li ◽  
Chengyi Xu ◽  
Feifei Zhang ◽  
Jianming Zheng ◽  
Chunye Xu
Keyword(s):  
Thin Films ◽  
Energy Harvesting ◽  
Formation Mechanism ◽  
Pressure Sensor ◽  
Salt Solution ◽  
Pvdf Film ◽  
Piezoelectric Thin Films

A PVDF film prepared on a salt solution is discovered to be self-polarized and is successfully applied in energy harvesting and pressure sensor.

Domain evolution of tetragonal Pb(ZrxTi1−x) O3 piezoelectric thin films on SrTiO3 (100) surfaces: combined effects of misfit strain and Zr/Ti ratio

2014 ◽  
Vol 2 (29) ◽  
pp. 5836-5841 ◽  
Author(s):  
Qi Yu ◽  
Jing-Feng Li ◽  
Fang-Yuan Zhu ◽  
Jiangyu Li
Keyword(s):  
Thin Films ◽  
Misfit Strain ◽  
Epitaxial Thin Films ◽  
Combined Effects ◽  
Piezoelectric Thin Films ◽  
Domain Evolution ◽  
Ferroelectric Domains ◽  
Substrate Constraint

The ferroelectric domains of tetragonal Pb(ZrxTi1−x)O3 epitaxial thin films have been studied comprehensively to reveal their piezoelectric responses under substrate constraint.

scholarly journals High coupling piezoelectric thin films of Pb(Zr,Ti)O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators

2009 ◽  
Vol 94 (17) ◽  
pp. 172903 ◽  
Author(s):  
N. Yamauchi ◽  
T. Shirai ◽  
T. Yoshihara ◽  
Y. Hayasaki ◽  
T. Ueda ◽  
...  
Keyword(s):  
Thin Films ◽  
Acoustic Resonators ◽  
Piezoelectric Thin Films ◽  
Film Bulk Acoustic Resonators ◽  
Film Bulk

Silk piezoelectric thin films: Materials to devices

2016 ◽  
Author(s):  
Jose Joseph ◽  
Sai Saraswathi ◽  
Anshika Agarwal ◽  
Shiv Govind Singh ◽  
Siva Rama Krishna Vanjari
Keyword(s):  
Thin Films ◽  
Piezoelectric Thin Films

Piezoelectric Thin Films: A Technology Platform for Innovative Devices

2012 ◽  
Vol 134 (1) ◽  
pp. 25-36 ◽  
Author(s):  
M. Klee ◽  
R. Mauczok ◽  
C. Van Heesch ◽  
B. op het Veld ◽  
M. De Wild ◽  
...  
Keyword(s):  
Thin Films ◽  
Technology Platform ◽  
Piezoelectric Thin Films
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