MEMS
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Published By CRC Press

9781315216393
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Electromechanical Loops for High-Performance and Robust Gyroscope System Design

MEMS ◽  
2017 ◽  
pp. 183-202
Author(s):  
Vikas Choudhary ◽  
Abhinav Dikshit ◽  
Anjan Kumar ◽  
Deva Phanindra Kumar ◽  
Saravanan Kamatchi ◽  
...  
Keyword(s):  
System Design ◽  
High Performance ◽  
Gyroscope System

Interface Circuits for Capacitive MEMS Gyroscopes

MEMS ◽  
2017 ◽  
pp. 161-181
Author(s):  
Hongzhi Sun ◽  
Huikai Xie
Keyword(s):  
Interface Circuits ◽  
Mems Gyroscopes ◽  
Capacitive Mems

Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications

MEMS ◽  
2017 ◽  
pp. 417-440
Author(s):  
Sylvain Ballandras ◽  
Gilles Martin ◽  
Jean-Michel Friedt ◽  
Victor Plessky ◽  
Virginie Blondeau-Pâtissier ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Acoustic Sensors ◽  
Wireless Applications

MEMS-Based Micro Hot-Plate Devices

MEMS ◽  
2017 ◽  
pp. 381-399
Author(s):  
Jürgen Hildenbrand ◽  
Andreas Greiner ◽  
Jan G. Korvink
Keyword(s):  
Hot Plate

Piezoelectric Thin Films for MEMS Applications

MEMS ◽  
2017 ◽  
pp. 41-67
Author(s):  
Isaku Kanno
Keyword(s):  
Thin Films ◽  
Piezoelectric Thin Films

MEMS-Based Lamellar Grating Fourier Transform Spectrometers

MEMS ◽  
2017 ◽  
pp. 249-271
Author(s):  
Hongbin Yu ◽  
Guangya Zhou ◽  
Fook Siong Chau
Keyword(s):  
Fourier Transform

Microsystems to Nano-Microsystems

MEMS ◽  
2017 ◽  
pp. 3-19
Author(s):  
Daniel Hauden

Mechanically Flexible Interconnects and TSVs

MEMS ◽  
2017 ◽  
pp. 111-130
Author(s):  
Hyung Suk Yang ◽  
Paragkumar Thadesar ◽  
Chaoqi Zhang ◽  
Muhannad Bakir

Bulk Acoustic Wave Gyroscopes

MEMS ◽  
2017 ◽  
pp. 91-110
Author(s):  
Houri Johari
Keyword(s):  
Acoustic Wave ◽  
Bulk Acoustic Wave
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