Two Dimensional Micro Optical Scanner

2000 ◽  
Vol 103 (984) ◽  
pp. 739-742
Author(s):  
Hiromi TOTANI ◽  
Hiroshi GOTO
2001 ◽  
pp. 1300-1303 ◽  
Author(s):  
Tarik Bourouina ◽  
Eric Lebrasseur ◽  
Gilbert Reyne ◽  
Hiroyuki Fujita ◽  
Takahisa Masuzawa ◽  
...  

2014 ◽  
Vol 24 (5) ◽  
pp. 055009 ◽  
Author(s):  
Sunghyun Yoo ◽  
Joo-Young Jin ◽  
Joon-Geun Ha ◽  
Chang-Hyeon Ji ◽  
Yong-Kweon Kim

2010 ◽  
Vol 434-435 ◽  
pp. 426-428
Author(s):  
Song Mei Yuan ◽  
Wei Dong Liu ◽  
Chi Zhuang

The structure and principle of an optical scanner actuated by PZT films have been presented in this paper. FEA software (ANSYS9.0) has been used to analyze the modal and harmonic characteristics of the scanner to acquire its dynamic characteristic and deformation, on which we base to optimize its structure. Finally, its resonance frequency and displacement were measured through experiment to testify its feasibility. It shows that the piezoelectric scanner can realize two-dimensional scanning at high frequency, and it can be fabricated conveniently because of its simple structure.


Sign in / Sign up

Export Citation Format

Share Document