Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes
2008 ◽
Vol E91-C
(10)
◽
pp. 1611-1615
◽
Keyword(s):
2018 ◽
Vol 2018
◽
pp. 1-6
◽
2001 ◽
Vol 10
(2)
◽
pp. 205-214
◽
1980 ◽
Vol 102
(2)
◽
pp. 125-137
◽
Keyword(s):
2014 ◽
Vol 532
◽
pp. 3-6
◽
Keyword(s):
2000 ◽
Vol 103
(984)
◽
pp. 739-742