T1602-1-3 Manipulation of Liquid Droplet by Electro Wetting in Silicon Oil Bath and Its Application to micro-TAS

2010 ◽  
Vol 2010.8 (0) ◽  
pp. 219-220
Author(s):  
Satoshi Yoshida ◽  
Kentaro Tanaka ◽  
Katsumi Iwamoto
2011 ◽  
Vol 2011 (1) ◽  
pp. 000352-000360
Author(s):  
B. Majeed ◽  
B. Jones ◽  
H. Oprins ◽  
B. Vandevelde ◽  
D. S. Tezcan ◽  
...  

This paper reports on the fabrication and characterization of an electrostatically actuated liquid droplet, impingement cooling device. The continuous increase of IC power density and the widespread use of 3D integration call for advanced cooling techniques. These are necessary to keep the device temperature low and to improve the reliability. Here we propose a 3D cooling device in which droplets are electrostatically actuated through vertical channels and impinge on an IC surface. The channels are formed by stacking thinned perforated silicon dice. By means of DRIE, vias with diameters ranging from 100 μm to 300 μm are etched into a low resistivity 200 mm silicon wafer. Further processing involves passivation with oxide, contact opening, bonding to a carrier wafer and grinding. Finally, stacking of the dies is achieved by debonding individual dies from the carrier wafer and bonding the first die to a silicon base. A second die is then aligned and bonded on top of the first one, and this operation is repeated a third and fourth time so as to create a “tower of Hanoi” structure. The preliminary results on the electro wetting properties of this device are reported.


Author(s):  
Zhenjun Jiao ◽  
Xiaoyang Huang ◽  
Nam-Trung Nguyen

Programmable thermocapillary manipulation of liquid droplet in a planar microchannel has been carried out by both theoretical modeling and experimental characterization in this paper. The driving temperature gradients are provided by four micro-heaters at the channel boundaries. In the modeling, the temperature distributions corresponding to both transient and periodic actuation are calculated, and are coupled to the droplet motion through the surface tensions which drives the droplet to move inside the channel. The droplet trajectories and final positions are simulted, and compared with the experimental results, in which a silicon oil droplet was actuated inside a 10 mm×10 mm planar channel with four heater fabricated on the substrate plate. The results show that the droplet can be positioned anywhere in the channel, determined by a heating code related to the heating strengths. Qualitative agreement between the modeling results and experimental data, in terms of temperature distributions, droplet positions and trajectories, has been obtained.


2021 ◽  
pp. 004051752110069
Author(s):  
Gannian Zhang ◽  
Qinfa Zhang

Resistance of military clothing to oil permeation is important for effective protection against chemical warfare. In this paper, while a military textile is rendered oleophobic (oil contact angle ≈ 120°) through plasma-assisted deposition of perfluorodecyl acrylate (PFAC8), permeation of the textile by silicon oil is observed. Using high-definition digital imaging, we study the oil permeation dynamics, rationalize the permeation with a plausible mechanism and identify the threshold textile pore size for prevention of the permeation. We find that oil permeates defects of PFAC8 textiles. Our data suggests a linear variation for oil permeation volume ΔV with time t and implies a gravity-driving permeation mechanism. The mechanism comprises three stages involving merging and propagation of oil–yarn contact lines. The threshold pore size dm scales with σ/ P, where σ is the oil surface tension and P is the hydrostatic head exerted by the oil drop. The paper indicates the importance of an undamaged textile structure to ‘robust’ oil resistance.


2021 ◽  
Vol 156 ◽  
pp. 108199
Author(s):  
Di Huang ◽  
Kewei Ning ◽  
Fulong Zhao ◽  
Jian Deng ◽  
Xiaoyu Wang ◽  
...  

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