On-machine surface measurement by a force sensor integrated Fast Tool Servo

2019 ◽  
Vol 2019.54 (0) ◽  
pp. 147
Author(s):  
Bo WEN ◽  
Jian-ping YU ◽  
Hiraku MATSUKUMA ◽  
Yuki SHIMIZU ◽  
Wei GAO
Keyword(s):  
Machine Surface ◽  
Force Sensor ◽  
Surface Measurement ◽  
Fast Tool Servo

Molecular dynamics simulation of elastic–plastic deformation associated with tool–workpiece contact in force sensor–integrated fast tool servo

2016 ◽  
Vol 232 (11) ◽  
pp. 1893-1902 ◽  
Author(s):  
Yindi Cai ◽  
Yuan-Liu Chen ◽  
Yuki Shimizu ◽  
So Ito ◽  
Wei Gao
Keyword(s):  
Molecular Dynamics ◽  
Machine Surface ◽  
Single Point ◽  
Force Sensor ◽  
Dynamics Simulation ◽  
Surface Form ◽  
Fast Tool Servo ◽  
Dynamics Model ◽  
Elastic Plastic ◽  
Diamond Cutting Tool

The tool–workpiece interactions when a single-point diamond cutting tool with specific tool edge geometry is made to contact with a copper workpiece are evaluated by the molecular dynamics simulations under different temperatures, boundary conditions and model sizes for ultra-precision microcutting and in-process surface form measurement based on a force sensor–integrated fast tool servo. It is confirmed that the proposed multi-relaxation time method is effective to stabilize the workpiece molecular dynamics model over a wide temperature range up to the room temperature under which a practical microcutting and on-machine surface form metrology process are conducted. The boundary condition and model size of the molecular dynamics model are then optimized to make reliable and cost-effective simulations for evaluation of the elastic–plastic transition contact depth and the corresponding contact force when a diamond tool with a practical edge sharpness of up to 30 nm is employed for microcutting and on-machine surface form metrology.

scholarly journals Integration of On-machine Surface Measurement into Fast Tool Servo Machining

Procedia CIRP ◽  
2021 ◽  
Vol 101 ◽  
pp. 238-241
Author(s):  
Wenbin Zhong ◽  
Zhen Tong ◽  
Xiangqian Jiang
Keyword(s):  
Machine Surface ◽  
Surface Measurement ◽  
Fast Tool Servo

Automatic Surface Characterization for Micro-Structured Surfaces Fabricated by Fast Tool Servo Diamond Turning

2010 ◽  
Vol 447-448 ◽  
pp. 534-538 ◽  
Author(s):  
De Ping Yu ◽  
Yoke San Wong ◽  
Geok Soon Hong
Keyword(s):  
Surface Characterization ◽  
General Purpose ◽  
Diamond Turning ◽  
Surface Measurement ◽  
Fast Tool Servo ◽  
Measurement Instruments ◽  
Form Error ◽  
Form Accuracy ◽  
Structured Surfaces ◽  
Resolution Measurement

Fast tool servo diamond turning is a promising machining method for precision and complex micro-structured surfaces with spatial wavelength above tens of microns. It is crucial to measure and characterize the micro-structured surfaces to sub-micrometer form accuracy. The general purpose measurement instruments are not able to evaluate the true form accuracy between the measured surface and designed surface. Therefore, in this paper an automatic surface characterization method is proposed to evaluate the form accuracy for micro-structured surfaces. The fabricated surfaces can be measured by any high-resolution measurement instruments. After the surface measurement, an iterative closest point (ICP) algorithm is modified to align the measured surfaces to the designed surfaces with the form error evenly distributed over the whole surface. After alignment, the designed surface height corresponding to each measured point is calculated to form the areal error map. 3D surface parameters are chosen and calculated from the error map to characterize the surface form error. Experimental results demonstrate the effectiveness of the proposed surface characterization method.

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