scholarly journals Influence of Low Energy Ar Ion Irradiation Treatment on Surface Properties of Deposited Metal Thin Films

2005 ◽  
Vol 71 (701) ◽  
pp. 102-107
Author(s):  
Tomonori SASAKI ◽  
Kinuko FUJIMOTO ◽  
Ming YANG
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Ion Irradiation ◽  
Low Energy ◽  
Metal Thin Films ◽  
Irradiation Treatment ◽  
Deposited Metal

Influence of low energy Ar ion irradiation to metal thin films

2004 ◽  
Vol 2004.1 (0) ◽  
pp. 389-390
Author(s):  
Tomonori SASAKI ◽  
Kinuko FUJIMOTO ◽  
Ming YANG
Keyword(s):  
Thin Films ◽  
Ion Irradiation ◽  
Low Energy ◽  
Metal Thin Films

Improvement and Evaluation of Metal Thin Films by Very Low Energy Argon Ion Irradiation

2004 ◽  
Author(s):  
Tomonori Sasaki ◽  
Ming Yang ◽  
Kinuko Fujimoto
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Ion Irradiation ◽  
Metal Films ◽  
Low Energy ◽  
Metal Thin Films ◽  
Ion Plasma ◽  
Integrated Intensity ◽  
Argon Ion

A new methodology using very low energy Ar ion irradiation is proposed to improve the mechanical properties of thin metal films deposited by sputtering. In this study, accelerating voltage of Ar ion plasma was set to lower than 100V, and several conditions were applied to irradiations. Consequently, it is found that Young’s modulus and hardness of Aluminum and Nickel thin film increases about 10% by the irradiation compared with a non-irradiated thin film. (111)–oriented integrated intensity of diffraction of Al and Ni thin film was increased by the irradiation. It is considered that crystalline orientation was changed and column spacing of the film be filled by the irradiation. It is shown that the proposed technique is effective to improve the mechanical properties of metal thin films with proper irradiation conditions.

scholarly journals Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

2019 ◽  
Vol 126 (15) ◽  
pp. 155301 ◽  
Author(s):  
C. R. Stilhano Vilas Boas ◽  
J. M. Sturm ◽  
F. Bijkerk
Keyword(s):  
Thin Films ◽  
Atomic Oxygen ◽  
Low Energy ◽  
Ion Scattering ◽  
Metal Thin Films ◽  
Low Energy Ion Scattering ◽  
Scattering Study

Stress evolution in platinum thin films during low-energy ion irradiation

2008 ◽  
Vol 77 (20) ◽  
Author(s):  
Wai-Lun Chan ◽  
Kai Zhao ◽  
Nhon Vo ◽  
Yinon Ashkenazy ◽  
David G. Cahill ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Irradiation ◽  
Low Energy ◽  
Stress Evolution

scholarly journals Oxidation and reduction processes in Ni/Cu/Cr/Si(100) thin films under low-energy ion irradiation

2020 ◽  
Vol 6 (12) ◽  
pp. 126431 ◽  
Author(s):  
I O Kruhlov ◽  
I A Vladymyrskyi ◽  
O Dubikovskyi ◽  
S I Sidorenko ◽  
T Ebisu ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Irradiation ◽  
Low Energy ◽  
Reduction Processes
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