Improvement and Evaluation of Metal Thin Films by Very Low Energy Argon Ion Irradiation

2004 ◽  
Author(s):  
Tomonori Sasaki ◽  
Ming Yang ◽  
Kinuko Fujimoto
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Ion Irradiation ◽  
Metal Films ◽  
Low Energy ◽  
Metal Thin Films ◽  
Ion Plasma ◽  
Integrated Intensity ◽  
Argon Ion

A new methodology using very low energy Ar ion irradiation is proposed to improve the mechanical properties of thin metal films deposited by sputtering. In this study, accelerating voltage of Ar ion plasma was set to lower than 100V, and several conditions were applied to irradiations. Consequently, it is found that Young’s modulus and hardness of Aluminum and Nickel thin film increases about 10% by the irradiation compared with a non-irradiated thin film. (111)–oriented integrated intensity of diffraction of Al and Ni thin film was increased by the irradiation. It is considered that crystalline orientation was changed and column spacing of the film be filled by the irradiation. It is shown that the proposed technique is effective to improve the mechanical properties of metal thin films with proper irradiation conditions.

Influence of low energy Ar ion irradiation to metal thin films

2004 ◽  
Vol 2004.1 (0) ◽  
pp. 389-390
Author(s):  
Tomonori SASAKI ◽  
Kinuko FUJIMOTO ◽  
Ming YANG
Keyword(s):  
Thin Films ◽  
Ion Irradiation ◽  
Low Energy ◽  
Metal Thin Films

scholarly journals Influence of argon ion irradiation dose on the formation of the surface layers composition and changing mechanical properties of ion-plasma coated carbon steel

2021 ◽  
Vol 2144 (1) ◽  
pp. 012023
Author(s):  
P V Bykov ◽  
V L Vorob’ev ◽  
S G Bystrov ◽  
V V Tarasov ◽  
A Yu Drozdov ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Wear Resistance ◽  
Carbon Steel ◽  
Ion Irradiation ◽  
Dose Range ◽  
Plasma Coating ◽  
Surface Layers ◽  
Ion Plasma ◽  
Steel Aisi ◽  
Argon Ion

Abstract The effect of argon ion irradiation with an energy of 40 keV in the dose range of 1016 - 1018 ion/cm2 on the formation of the surface layers composition, changes in the morphology and mechanical properties (microhardness, and wear resistance) of carbon steel AISI 1020 with a deposited ion-plasma coating Ni80Cr20 was studied. It is shown that irradiation with doses greater than 1017 ion/cm2 leads to the formation of a layer consisting of nickel, chromium and iron. The most optimal treatment mode for improving wear resistance is irradiation with a dose of 5.1017 ion/cm2.

Structural-Mechanical Properties of Polyurethane Surface after Carbon Ion Subplantation

2021 ◽  
Vol 887 ◽  
pp. 370-375
Author(s):  
I.A. Morozov ◽  
A.S. Kamenetskikh
Keyword(s):  
Mechanical Properties ◽  
Surface Relief ◽  
Low Energy ◽  
Plasma Modification ◽  
Carbon Ions ◽  
Uniaxial Deformation ◽  
Treatment Regimes ◽  
Subsequent Investigation ◽  
Ion Plasma ◽  
Potential Applications

Ion-plasma modification of polymers has many potential applications, in particular, in the development of biomedical products. Treatment of soft polymers can easily damage the surface; low-energy plasma and subsequent investigation of the structural and mechanical properties of the surface are required. Polyurethane is a widely used block copolymer. Subplantation of carbon ions heterogeneously changes the structural and mechanical properties of the surface (relief, stiffness, thickness of the modified coating), forming a graphene-like nanolayer. Uniaxial deformation of the treated materials in some cases leads to the damage of the surface (local nanocracks, folds). Materials have increased hydrophobicity, good deformability (valid for certain treatment regimes) and can find application in design of products with improved biomedical properties.

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Single Layer ◽  
Beam Theory ◽  
New Technique ◽  
Young’S Moduli ◽  
Silicon Micromachining ◽  
A New Technique

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

Anatase TiO2-based two-dimensional electron gases generated by low-energy argon-ion irradiation

2018 ◽  
Vol 112 (24) ◽  
pp. 241601
Author(s):  
Xi Yan ◽  
Hongrui Zhang ◽  
Hui Zhang ◽  
Tahira Khan ◽  
Jine Zhang ◽  
...  
Keyword(s):  
Ion Irradiation ◽  
Anatase Tio2 ◽  
Low Energy ◽  
Two Dimensional ◽  
Dimensional Electron ◽  
Electron Gases ◽  
Argon Ion

scholarly journals Oxidation of metal thin films by atomic oxygen: A low energy ion scattering study

2019 ◽  
Vol 126 (15) ◽  
pp. 155301 ◽  
Author(s):  
C. R. Stilhano Vilas Boas ◽  
J. M. Sturm ◽  
F. Bijkerk
Keyword(s):  
Thin Films ◽  
Atomic Oxygen ◽  
Low Energy ◽  
Ion Scattering ◽  
Metal Thin Films ◽  
Low Energy Ion Scattering ◽  
Scattering Study
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