Fabrication and Characterization of Silicon Photonic Waveguides and Devices via Selective Oxidation Process

2012 ◽  
Author(s):  
Xiaokun Wang ◽  
Xiaowei Guan ◽  
Yaocheng Shi ◽  
Daoxin Dai
Keyword(s):  
Selective Oxidation ◽  
Oxidation Process ◽  
Silicon Photonic ◽  
Photonic Waveguides ◽  
Fabrication And Characterization

Fabrication and Characterization of Doped Polysilicon Nanowire for pH Sensor

2015 ◽  
Vol 754-755 ◽  
pp. 561-566
Author(s):  
Su C.S. Stephen ◽  
Mohd Khairuddin Md Arshad ◽  
Mohammad Nuzaihan Md Nor ◽  
M.F.M. Fathil ◽  
A. Rahim Ruslinda ◽  
...  
Keyword(s):  
Oxidation Process ◽  
Ph Sensor ◽  
Low Ph ◽  
The Other ◽  
Ph Measurement ◽  
Wet Oxidation ◽  
Ph Sensors ◽  
Fabrication And Characterization ◽  
The Impact

This paper presents the characteristics of the doped polysilicon nanowire for pH sensors. The fabrication involved two chromium mask designs. Example the first mask is used for the polysilicon nanowire pattern and the other one is for pad patterning. It involved of photolithography, deposition, etching and wet oxidation process. Different length, number of polysilicon are fabricated and then subjected to voltage, current and pH measurement. APTES is being introduced to improve the sensitivity of the polysilicon nanowire. For the low pH, the conductivity is high, while for the high pH, the conductivity is low. The impact on investigating length is insignificant to the sensitivity of the doped polysilicon nanowire.

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization

Fabrication and Characterization of Chain-like Arrangement of Gold Nanoparticles using Nanotemplates

2015 ◽  
Vol 135 (11) ◽  
pp. 474-475
Author(s):  
Koji Sugano ◽  
Ryoji Hiraoka ◽  
Toshiyuki Tsuchiya ◽  
Osamu Tabata
Keyword(s):  
Gold Nanoparticles ◽  
Fabrication And Characterization

Fabrication and Characterization of Metal-to-Metal Interconnect Structures for 3-D Integration

2008 ◽  
Author(s):  
Alan Huffman ◽  
John Lannon ◽  
Matthew Lueck ◽  
Christopher Gregory ◽  
Dorota Temple
Keyword(s):  
Fabrication And Characterization
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