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2002 ◽  
Vol 41 (28) ◽  
pp. 5943 ◽  
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Artur Olszak
Keyword(s):  
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Real-time scanner error correction in white light interferometry

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Joanna Schmit ◽  
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Vol 157 (1-6) ◽  
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Author(s):  
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Keyword(s):  
Real Time ◽  
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White Light Interferometry ◽  
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Vol 56 (13) ◽  
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Qian Chen ◽  
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...  
Keyword(s):  
Real Time ◽  
High Precision ◽  
Shape Measurement ◽  
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3D Shape Measurement
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