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Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering
Applied Optics
◽
10.1364/ao.48.004536
◽
2009
◽
Vol 48
(23)
◽
pp. 4536
◽
Cited By ~ 45
Author(s):
Eda Çetinörgü
◽
Bill Baloukas
◽
Oleg Zabeida
◽
Jolanta E. Klemberg-Sapieha
◽
Ludvik Martinu
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Thermoelastic Characteristics
◽
Dual Ion Beam Sputtering
Download Full-text
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References
Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering
Journal of Applied Physics
◽
10.1063/1.2197287
◽
2006
◽
Vol 99
(11)
◽
pp. 113519
◽
Cited By ~ 90
Author(s):
G. Abadias
◽
Y. Y. Tse
◽
Ph. Guérin
◽
V. Pelosin
Keyword(s):
Thin Films
◽
Surface Morphology
◽
Ion Beam
◽
Preferred Orientation
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Tin Thin Films
◽
Dual Ion Beam Sputtering
Download Full-text
Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering
Thin Solid Films
◽
10.1016/0040-6090(93)90720-a
◽
1993
◽
Vol 223
(1)
◽
pp. 11-13
◽
Cited By ~ 13
Author(s):
Yijie Li
◽
Guangcheng Xiong
◽
Guijun Lian
◽
Jie Li
◽
Zizhao Gan
Keyword(s):
Thin Films
◽
Epitaxial Growth
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering
Thin Solid Films
◽
10.1016/j.tsf.2007.08.051
◽
2008
◽
Vol 516
(11)
◽
pp. 3582-3585
◽
Cited By ~ 4
Author(s):
S.G. Yoon
◽
S.M. Kang
◽
W.S. Jung
◽
S.-W. Kim
◽
D.H. Yoon
Keyword(s):
Thin Films
◽
Optical Properties
◽
Ion Beam
◽
Intrinsic Stress
◽
Ion Beam Sputtering
◽
Beam Voltage
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Hard BCxNy thin films grown by dual ion beam sputtering
Thin Solid Films
◽
10.1016/j.tsf.2005.12.063
◽
2006
◽
Vol 515
(1)
◽
pp. 207-211
◽
Cited By ~ 37
Author(s):
C. Morant
◽
P. Prieto
◽
J. Bareño
◽
J.M. Sanz
◽
E. Elizalde
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Room temperature synthesis of boron nitride thin films by dual-ion beam sputtering deposition
Ceramics International
◽
10.1016/j.ceramint.2015.11.090
◽
2016
◽
Vol 42
(3)
◽
pp. 4171-4175
◽
Cited By ~ 1
Author(s):
Z.F. Wu
◽
L. Guo
◽
K. Cheng
◽
F. Zhang
◽
R.F. Guan
Keyword(s):
Thin Films
◽
Boron Nitride
◽
Room Temperature
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Temperature Synthesis
◽
Sputtering Deposition
◽
Room Temperature Synthesis
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Processing of La1.8Sr0.2CuO4and YBa2Cu3O7superconducting thin films by dual‐ion‐beam sputtering
Journal of Applied Physics
◽
10.1063/1.341106
◽
1988
◽
Vol 63
(6)
◽
pp. 2046-2053
◽
Cited By ~ 68
Author(s):
P. Madakson
◽
J. J. Cuomo
◽
D. S. Yee
◽
R. A. Roy
◽
G. Scilla
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Iron Thin Films by Means of Dual Ion-Beam Sputtering
IEEE Translation Journal on Magnetics in Japan
◽
10.1109/tjmj.1985.4548833
◽
1985
◽
Vol 1
(4)
◽
pp. 488-490
Author(s):
M. Yamaga
◽
N. Terada
◽
M. Naoe
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Characteristics of AlN Thin Films Deposited by Electron Cyclotron Resonance Dual-Ion-Beam Sputtering and Their Application to GHz-Band Surface Acoustic Wave Devices
Japanese Journal of Applied Physics
◽
10.1143/jjap.33.2957
◽
1994
◽
Vol 33
(Part 1, No. 5B)
◽
pp. 2957-2961
◽
Cited By ~ 14
Author(s):
Hiroshi Okano
◽
Naoki Tanaka
◽
Yasuhiro Hirao
◽
Yasumi Kobayashi
◽
Kenichi Shibata
◽
...
Keyword(s):
Thin Films
◽
Acoustic Wave
◽
Surface Acoustic Wave
◽
Cyclotron Resonance
◽
Electron Cyclotron Resonance
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Acoustic Wave Devices
◽
Dual Ion Beam Sputtering
Download Full-text
TfC16. Growth of perovksite PLZT thin films by dual ion beam sputtering
Ferroelectrics
◽
10.1080/00150199208015603
◽
1992
◽
Vol 134
(1)
◽
pp. 297-302
◽
Cited By ~ 5
Author(s):
D. A. Tossell
◽
N. M. Shorrocks
◽
J. S. Obhi
◽
R. W. Whatmore
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Plzt Thin Films
◽
Dual Ion Beam Sputtering
Download Full-text
Synthesis of AlN Thin Films by Dual Ion Beam Sputtering Method
Laser and Ion Beam Modification of Materials
◽
10.1016/b978-0-444-81994-9.50089-0
◽
1994
◽
pp. 427-430
Author(s):
E. Kamijo
◽
T. Suzuki
Keyword(s):
Thin Films
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
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