Stroboscopic Two-Wavelength Interferometer for Disturbance-Free Step-Height Measurement

2005 ◽  
Author(s):  
Takamasa Suzuki ◽  
Masanori Ohida ◽  
Kazuhiro Yokoyama ◽  
Osami Sasaki
Keyword(s):  
Step Height ◽  
Height Measurement

scholarly journals Simple tunable dual-wavelength fiber laser and multiple self-mixing interferometry to large step height measurement

2016 ◽  
Vol 24 (19) ◽  
pp. 21880 ◽  
Author(s):  
Lianlian Dong ◽  
Fang Xie ◽  
Sen Ma ◽  
Yunzhi Wang ◽  
Liang Chen
Keyword(s):  
Fiber Laser ◽  
Dual Wavelength ◽  
Step Height ◽  
Height Measurement ◽  
Large Step

Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry—application to absolute long gauge block measurement

2003 ◽  
Vol 42 (28) ◽  
pp. 5670 ◽  
Author(s):  
Jennifer E. Decker ◽  
John R. Miles ◽  
Alan A. Madej ◽  
Ralph F. Siemsen ◽  
Klaus J. Siemsen ◽  
...  
Keyword(s):  
Step Height ◽  
Height Measurement ◽  
Gauge Block ◽  
Multiple Wavelength

scholarly journals Metrological atomic force microscope and traceable measurement of nano-dimension structures

ACTA IMEKO ◽  
2013 ◽  
Vol 2 (1) ◽  
pp. 12 ◽  
Author(s):  
Sitian Gao ◽  
Mingzhen Lu ◽  
Wei Li ◽  
Yushu Shi ◽  
Qi Li
Keyword(s):  
Atomic Force Microscope ◽  
Line Width ◽  
Semiconductor Industry ◽  
Step Height ◽  
Optical Instrument ◽  
Font Size ◽  
Height Measurement ◽  
Dimensional Measurement ◽  
Atomic Force ◽  
Width Measurement

<span style="font-family: &quot;Times New Roman&quot;; font-size: 10pt; mso-fareast-font-family: 宋体; mso-ansi-language: EN-GB; mso-fareast-language: ZH-CN; mso-bidi-language: AR-SA; mso-bidi-font-size: 12.0pt;" lang="EN-GB">The quantity assurance in semiconductor industry development requires dimensional measurement with nanometer accuracy. A metrological AFM is designed to establish a traceable standard with nanometer uncertainty. The principle and design of the instrument is introduced in this paper. The displacement of the sample is traced to the SI unit by interferometers. The metrological AFM is applied to step height and line width measurement. The results are compared with optical instrument and profilometer. The metrological AFM is used to step height measurement in an international comparison and the result shows an uncertainty less than </span><span style="font-family: &quot;Times New Roman&quot;; font-size: 10pt; mso-fareast-font-family: 宋体; mso-ansi-language: EN-CA; mso-fareast-language: ZH-CN; mso-bidi-language: AR-SA; mso-bidi-font-size: 12.0pt;" lang="EN-CA">2 nm. The application of metrological AFM in line width and pitch are also introduced.</span>

Development of Optical Step Height Measurement Capability for the BOLT Flight Vehicle

2022 ◽  
Author(s):  
Brett F. Bathel ◽  
Joshua M. Weisberger ◽  
Scott A. Berry ◽  
Stephen B. Jones
Keyword(s):  
Step Height ◽  
Flight Vehicle ◽  
Height Measurement ◽  
Measurement Capability
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