Abstract
Low temperature co-fired ceramic (LTCC) based microfluidic sensors have been developed for biomedical and environmental sensing systems. This paper introduces a microfluidic chamber based on impedance spectroscopy measurements using LTCC technology for wireless Lab-On-A-Chip (LOC) applications. To overcome the channel sagging during the fabrication process, we used sacrificial carbon tapes as solid inserts, thus guiding the LTCC to follow their shape upon lamination and then formed micro-channels. The measurement chamber was a parallel-plate capacitive structure with 85 μm gap. This platform requires a small fluid sample of less than 4 μL. The sensor formed by the microfluidic channel and capacitance structure was characterized using different dielectric materials such as air, water and acetone. We hereby present the capability of LTCC-based systems in fluid identification by detecting their electrical permittivity using capacitance measurement.
Quantitative phase-contrast MRI study of cerebrospinal fluid flow: a method for identifying patients with normal-pressure hydrocephalus
