Errors in ellipsometry measurements made with a photoelastic modulator

1983 ◽  
Vol 73 (7) ◽  
pp. 892 ◽  
Author(s):  
F. A. Modine ◽  
G. E. Jellison ◽  
G. R. Gruzalski
2017 ◽  
Vol 25 (5) ◽  
pp. 5725 ◽  
Author(s):  
Li Kewu ◽  
Zhang Rui ◽  
Jing Ning ◽  
Chen Youhua ◽  
Zhang Minjuan ◽  
...  

2004 ◽  
Vol 43 (2) ◽  
pp. 827-832 ◽  
Author(s):  
Meng-Wei Wang ◽  
Yu-Faye Chao ◽  
Keh-Chyang Leou ◽  
Fei-Hsin Tsai ◽  
Tsang-Lang Lin ◽  
...  

2005 ◽  
Author(s):  
Karlton Crabtree ◽  
Neil Beaudry ◽  
Russell Chipman

2007 ◽  
Vol 46 (5) ◽  
pp. 699 ◽  
Author(s):  
Aijun Zeng ◽  
Lihua Huang ◽  
Zuoren Dong ◽  
Jianming Hu ◽  
Huijie Huang ◽  
...  

2013 ◽  
Vol 21 (4) ◽  
pp. 876-883 ◽  
Author(s):  
王志斌 WANG Zhi-bin ◽  
张瑞 ZHANG Rui ◽  
赵冬娥 ZHAO Dong-e ◽  
陈友华 CHEN You-hua ◽  
魏海潮 WEI Hai-chao

1986 ◽  
Vol 40 (4) ◽  
pp. 498-503 ◽  
Author(s):  
R. T. Graf ◽  
F. Eng ◽  
J. L. Koenig ◽  
H. Ishida

Polarization modulation infrared ellipsometric spectra were collected on an FT-IR spectrometer, with the use of two linear polarizers and a photoelastic modulator. Samples consisted of thin poly(vinyl acetate) and poly(methyl methacrylate) films on gold substrates. The relative phase retardation (delta) and relative amplitude (psi) were derived from these measurements. These spectra were superior to those from static infrared ellipsometry measurements on the same samples. The thickness and optical constants of the films were calculated from the ellipsometric measurements and compared with reference optical constant spectra.


Sign in / Sign up

Export Citation Format

Share Document