Investigation of the Anisotropic Stress and Optoelectronic Properties of MZO Film deposited on flexible substrate with RF Magnetron Sputtering

2019 ◽  
Author(s):  
Hsi-Chao Chen ◽  
Guan-Ting Peng ◽  
Tan-Fu Liu ◽  
Ru-Fong Lai ◽  
Min-Yi Jiang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Flexible Substrate ◽  
Rf Magnetron Sputtering ◽  
Optoelectronic Properties ◽  
Anisotropic Stress

Tailoring optoelectronic properties of earth abundant ZnSnN2 by combinatorial RF magnetron sputtering

2019 ◽  
Vol 772 ◽  
pp. 348-358 ◽  
Author(s):  
Karthik kumar Chinnakutti ◽  
Vengatesh Panneerselvam ◽  
Shyju Thankaraj Salammal
Keyword(s):  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Optoelectronic Properties ◽  
Earth Abundant

ITO films deposited on water-cooled flexible substrate by bias RF Magnetron Sputtering

2000 ◽  
Vol 161 (1-2) ◽  
pp. 279-285 ◽  
Author(s):  
Zhiwei Yang ◽  
Shenghao Han ◽  
Tianlin Yang ◽  
Lina Ye ◽  
Honglei Ma ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Flexible Substrate ◽  
Rf Magnetron Sputtering ◽  
Ito Films

Preparation and optoelectronic properties of a-IGZO thin films deposited by RF magnetron sputtering at different working pressures

Rare Metals ◽  
2014 ◽  
Vol 37 (7) ◽  
pp. 599-603
Author(s):  
Rui-Xin Ma ◽  
Yu-Qin Xiao ◽  
Shi-Na Li ◽  
Yuan-Yuan Wang ◽  
Dong-Ran Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Optoelectronic Properties
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