scholarly journals Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites

PLoS ONE ◽  
2015 ◽  
Vol 10 (7) ◽  
pp. e0133479 ◽  
Author(s):  
Khaled Sayed Elbadawi Ramadan ◽  
Stephane Evoy
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride ◽  
Reactive Sputtering ◽  
Thin Aluminum

Microscopic investigations of aluminum nitride thin films grown by low-temperature reactive sputtering

2005 ◽  
Vol 483 (1-2) ◽  
pp. 16-20 ◽  
Author(s):  
Q.X. Guo ◽  
M. Yoshitugu ◽  
T. Tanaka ◽  
M. Nishio ◽  
H. Ogawa
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Aluminum Nitride ◽  
Reactive Sputtering ◽  
Microscopic Investigations

Epitaxial growth of aluminum nitride on AlGaN by reactive sputtering at low temperature

2008 ◽  
Vol 93 (5) ◽  
pp. 052905 ◽  
Author(s):  
C. Duquenne ◽  
M. A. Djouadi ◽  
P. Y. Tessier ◽  
P. Y. Jouan ◽  
M. P. Besland ◽  
...  
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride ◽  
Epitaxial Growth ◽  
Reactive Sputtering

Colorless, transparent,c‐oriented aluminum nitride films grown at low temperature by a modified sputter gun

1981 ◽  
Vol 39 (8) ◽  
pp. 643-645 ◽  
Author(s):  
S. Onishi ◽  
M. Eschwei ◽  
S. Bielaczy ◽  
W‐C. Wang
Keyword(s):  
Low Temperature ◽  
Aluminum Nitride

Target for a Pb(Zr,Ti)O3Thin Film Deposited at a Low Temperature Using a Quasi-Metallic Mode of Reactive Sputtering

1999 ◽  
Vol 38 (Part 1, No. 12A) ◽  
pp. 6882-6886 ◽  
Author(s):  
Je-Deok Kim ◽  
Shinya Kawagoe ◽  
Kimihiro Sasaki ◽  
Tomonobu Hata
Keyword(s):  
Low Temperature ◽  
Reactive Sputtering
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