Epitaxial growth of aluminum nitride on AlGaN by reactive sputtering at low temperature
2001 ◽
Vol 19
(4)
◽
pp. 1586-1590
◽
2021 ◽
Keyword(s):
1996 ◽
Vol 166
(1-4)
◽
pp. 628-630
◽
2001 ◽
Vol 231
(1-2)
◽
pp. 242-247
◽
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 9B)
◽
pp. 5084-5088
◽