scholarly journals Nano-scale Surface and Interface Analysis Using X-ray Spectromicroscopy Assisted by Measurement Informatics

2021 ◽  
Vol 64 (8) ◽  
pp. 382-389
Author(s):  
Naoka NAGAMURA ◽  
Tarojiro MATSUMURA ◽  
Kenji NAGATA ◽  
Shotaro AKAHO ◽  
Yasunobu ANDO
Keyword(s):  
X Ray ◽  
Interface Analysis ◽  
Surface And Interface ◽  
Nano Scale ◽  
Scale Surface

NANO-SCALE SURFACE REPLICATION BY POLYMER LAYERS: SPM AND X-RAY INVESTIGATIONS

2003 ◽  
Author(s):  
S. V. GAPONOV ◽  
B. A. GRIBKOV ◽  
V. L. MIRONOV ◽  
N. N. SALASHCHENKO ◽  
S. A. TRESKOV ◽  
...  
Keyword(s):  
X Ray ◽  
Polymer Layers ◽  
Nano Scale ◽  
Scale Surface

Surface and Interface Analysis of Thin-Film/Si(Substrate) Contacts by Sxes

1996 ◽  
Vol 448 ◽  
Author(s):  
C. Heck ◽  
M. Kusaka ◽  
M. Hirai ◽  
H. Nakamura ◽  
M. Iwami ◽  
...  
Keyword(s):  
Thin Film ◽  
Free Path ◽  
Energetic Electron ◽  
Mean Free Path ◽  
Si Substrate ◽  
X Ray ◽  
Interface Analysis ◽  
Surface And Interface ◽  
The Mean ◽  
Primary Electrons

AbstractA soft X-ray emission spectroscopy(SXES) study under an energetic electron irradiation has been applied to a nondestructive buried interface analysis of a thin-film(e.g., Cr)/Si(substrate) contact system, where the energy of primary electrons, Ep , is less than 20keV. An interesting point of this method is that we can have a specific signal for an element to be used as a finger print, otherwise it is difficult. By using this e-beam excited SXES, we can study an interface buried deep in a rather thick overlayer, e.g., more than a hundred of nm, which is due to the fact that a mean free path of a soft X-ray or an X-ray production depth is much larger than the mean free path of an energetic electron in solids. Electronic structural study of silicides by SXES is also shown.

OPTICAL PROPERTIES OF Cd0.55Mn0.45Te FILMS WITH NANO-SCALE SURFACE FORMATIONS

2017 ◽  
Vol 76 (10) ◽  
pp. 865-871
Author(s):  
V. P. Makhniy ◽  
P. P. Horley ◽  
A. M. Slyotov
Keyword(s):  
Optical Properties ◽  
Nano Scale ◽  
Scale Surface
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