scholarly journals Development of Secondary Ion Optical System to Achieve Three-Dimensional Shave-off SIMS

2019 ◽  
Vol 25 (3) ◽  
pp. 172-180
Author(s):  
Kohei Matsumura ◽  
So-Hee Kang ◽  
Bunbunoshin Tomiyasu ◽  
Masanori Owari
Keyword(s):  
Optical System ◽  
Three Dimensional ◽  
Ion Optical System ◽  
Secondary Ion

Atomic Resolution in Crystal Aperture Stem

1990 ◽  
Vol 48 (1) ◽  
pp. 236-237
Author(s):  
J T Fourie
Keyword(s):  
Optical System ◽  
Spherical Aberration ◽  
Three Dimensional ◽  
Transmission Function ◽  
Optical Systems ◽  
Bragg Angle ◽  
Electron Optical System ◽  
Intimate Contact ◽  
Diffraction Effects ◽  
Design Aspect

The attempts at improvement of electron optical systems to date, have largely been directed towards the design aspect of magnetic lenses and towards the establishment of ideal lens combinations. In the present work the emphasis has been placed on the utilization of a unique three-dimensional crystal objective aperture within a standard electron optical system with the aim to reduce the spherical aberration without introducing diffraction effects. A brief summary of this work together with a description of results obtained recently, will be given.The concept of utilizing a crystal as aperture in an electron optical system was introduced by Fourie who employed a {111} crystal foil as a collector aperture, by mounting the sample directly on top of the foil and in intimate contact with the foil. In the present work the sample was mounted on the bottom of the foil so that the crystal would function as an objective or probe forming aperture. The transmission function of such a crystal aperture depends on the thickness, t, and the orientation of the foil. The expression for calculating the transmission function was derived by Hashimoto, Howie and Whelan on the basis of the electron equivalent of the Borrmann anomalous absorption effect in crystals. In Fig. 1 the functions for a g220 diffraction vector and t = 0.53 and 1.0 μm are shown. Here n= Θ‒ΘB, where Θ is the angle between the incident ray and the (hkl) planes, and ΘB is the Bragg angle.

Algorithm for Constructing a Multidimensional Stability Domain of a Charged Particle in an Ion-Optical System with Periodic Supply Voltage

2021 ◽  
Author(s):  
Alexander Berdnikov ◽  
Vladimir Kapralov ◽  
Konstantin Solovyev ◽  
Nadezhda Krasnova
Keyword(s):  
Charged Particle ◽  
Optical System ◽  
Supply Voltage ◽  
Stability Domain ◽  
Ion Optical System

Simulating optical system performance with three-dimensional scenes

2015 ◽  
Author(s):  
William J. Duncan ◽  
Jim Schwiegerling
Keyword(s):  
Optical System ◽  
System Performance ◽  
Three Dimensional

scholarly journals Three-Dimensional Image of Cleavage Bodies in Nuclei Is Configured Using Gas Cluster Ion Beam with Time-of-Flight Secondary Ion Mass Spectrometry

2015 ◽  
Vol 5 (1) ◽  
Author(s):  
Noritaka Masaki ◽  
Itsuko Ishizaki ◽  
Takahiro Hayasaka ◽  
Gregory L. Fisher ◽  
Noriaki Sanada ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Three Dimensional ◽  
Time Of Flight ◽  
Dimensional Image ◽  
Ion Mass Spectrometry ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Secondary Ion

Deceleration ion optical system for sputtering measurements between 50 and 500 eV as function of angle of incidence

1987 ◽  
Vol 58 (10) ◽  
pp. 1830-1832 ◽  
Author(s):  
H. Liebl ◽  
J. Bohdansky ◽  
J. Roth ◽  
V. Dose
Keyword(s):  
Optical System ◽  
Angle Of Incidence ◽  
Ion Optical System

Three dimensional analysis of self-structuring organic thin films using time-of-flight secondary ion mass spectrometry

2011 ◽  
Vol 519 (18) ◽  
pp. 6183-6189 ◽  
Author(s):  
Karl E. Mayerhofer ◽  
Jakob Heier ◽  
Ylenia Maniglio ◽  
Beat Andreas Keller
Keyword(s):  
Mass Spectrometry ◽  
Thin Films ◽  
Dimensional Analysis ◽  
Secondary Ion Mass Spectrometry ◽  
Three Dimensional ◽  
Time Of Flight ◽  
Organic Thin Films ◽  
Ion Mass Spectrometry ◽  
Secondary Ion
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