Experimental Techniques for the Measurement of Mechanical Properties of Materials Used in Microelectromechanical Systems
2017 ◽
Vol 17
(01)
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pp. 61-65
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2014 ◽
Vol 20
(6)
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pp. 499-510
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1992 ◽
Vol 44
(158)
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pp. 1-14
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2020 ◽
Vol 734
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pp. 012182
2009 ◽
Vol 88
(5)
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pp. 1484-1491
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