The influence of íf discharge parameters and heater settings on the substrate temperature in the plasma-chemical reactor «almaz» for the synthesis of diamond-like carbon films
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2009 ◽
Vol 29
(4)
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pp. 275-290
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2015 ◽
Vol 88
(6)
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pp. 1459-1465
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2018 ◽
Vol 20
(2)
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pp. 025505
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