Silicon Film Deposition using a Gas-Jet Plasma-Chemical Method: Experiment and Gas-Dynamic Simulation

AbstractDoped silicon films are fabricated using diborane and phosphine as doping gases by gas-jet plasma-chemical deposition with the application of an electron beam. The influence of the dopant-gas concentration, the addition of a fluorine-containing gas, and the background pressure on the conductivity and crystalline structure of silicon layers is investigated. Boron-doped amorphous films ( a -Si:H) with a conductivity up to 5.2 × 10^–3 (Ω cm)^–1 are fabricated; when doping with phosphorus, microcrystalline silicon films ( mc -Si:H) with a crystallinity up to 70% and conductivity at a level of 1 (Ω cm)^–1 are fabricated.

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1D GAS-DYNAMIC SIMULATION OF SHOCK-WAVE PROCESSES VIA INTERNET

10.1063/1.3295236 ◽

2009 ◽

Cited By ~ 3

Author(s):

K. V. Khishchenko ◽

P. R. Levashov ◽

M. E. Povarnitsyn ◽

A. S. Zakharenkov ◽

Mark Elert ◽

...

Keyword(s):

Shock Wave ◽

Dynamic Simulation ◽

Wave Processes ◽

Gas Dynamic

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Effect of diluent gas on silicon film deposition from a free jet of monosilane-diluent mixture activated by electron-beam plasma

Journal of Engineering Thermophysics ◽

10.1134/s1810232812010055 ◽

2012 ◽

Vol 21 (1) ◽

pp. 52-59 ◽

Cited By ~ 5

Author(s):

S. Ya. Khmel

Keyword(s):

Electron Beam ◽

Silicon Film ◽

Film Deposition ◽

Free Jet ◽

Beam Plasma ◽

Electron Beam Plasma

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Акустические характеристики автоколебательного процесса, возникающего при взаимодействии сверхзвуковой недорасширенной струи с цилиндрической полостью

Журнал технической физики ◽

10.21883/jtf.2020.05.49172.345-19 ◽

2020 ◽

Vol 90 (5) ◽

pp. 733

Author(s):

К.Н. Волков ◽

В.Н. Емельянов ◽

А.В. Ефремов ◽

А.И. Цветков

Keyword(s):

Atmospheric Pressure ◽

Acoustic Waves ◽

Supersonic Jet ◽

Cavity Resonator ◽

Dynamic Structure ◽

Gas Jet ◽

Working Pressure ◽

Gas Dynamic ◽

Physical Pattern ◽

Cylindrical Cavities

In high-pressure gas-jet emitters, the source of sound energy is kinetic energy of gas jet at supercritical pressure ratios between the working pressure and the atmospheric pressure. Under certain conditions, interaction of a supersonic jet with the resonator is accompanied by powerful self-excited oscillating process with the generation of acoustic waves into the environment and cavity resonator. A model of a self-excited oscillating process arising from the interaction of non-isobaric jet with semi-closed cylindrical cavities, allowing to distinguish typical elements of gas-dynamic structure of the forming flow, is considered. The physical pattern of the flow in the cavity of gas-jet emitter is discussed, and a study of the dependence of the characteristics of the self-excited oscillating process on the gas-dynamic and geometric parameters is performed.

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