The subject of this study were nano-nanoscale multilayer coatings formed using the process of filtered cathodic vacuum arc deposition in assisting high-energy ions of chromium. We used a special emitter (implantor) to generate chromium ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. It is establish the positive change of key properties of coating deposited on carbide inserts WC/CrC/Co, WC / (Co-Re), TiC/TaC/Co at assisted impact of ions Cr at ion acceleration voltage within the range of 10-40 kV. The results of measurement of parameters of coatings with use nanoindentometer are consistent with the X-ray analysis of the stresses in the coating (XSA study). The mechanisms of the effect of modified properties of coatings formed in assisting the filtered cathodic vacuum arc deposition on the properties of the carbide inserts in cutting structural steels and hard-to-cut nickel alloys have confirmed the high efficiency of the deposition process developed coatings and coating compositions.
Properties of AlN Film Formed by Vacuum Arc Deposition Process