Enhanced Nanoparticle Removal Using Surfactants

MRS Advances ◽  
2016 ◽  
Vol 1 (31) ◽  
pp. 2213-2224
Author(s):  
Michael L. Free
Keyword(s):  
Critical Micelle Concentration ◽  
Semiconductor Manufacturing ◽  
Chemical Mechanical Planarization ◽  
Ionic Surfactant ◽  
Electrostatic Repulsion ◽  
Particle Removal ◽  
Precision Manufacturing ◽  
Manufacturing Operations ◽  
Drag Forces ◽  
Fluid Drag

ABSTRACTNanoparticles are used in chemical mechanical planarization for semiconductor manufacturing as well as in other precision manufacturing operations. Particles used in processing need to be removed from surfaces in order to enhance yields. Nanoparticles are difficult to remove from surfaces during cleaning due to the high van der Waals attractive forces between particles and surfaces relative to the low fluid drag forces that are used for typical removal methods. Ionic surfactant molecules can adsorb on particles and surfaces to create an electrostatic repulsion between particles and surfaces as well as provide a steric barrier to mitigate adsorption and adhesion. The effectiveness of the surfactant in enhancing particle removal is related to surfactant properties, and it can be correlated with and modeled relative to the critical micelle concentration of the surfactant. The general approach for modeling will be discussed, and the model will be compared with particle removal data.

The E-ring: interactions with plasma and implications for its evolution

1984 ◽  
Vol 75 ◽  
pp. 599-602
Author(s):  
T.V. Johnson ◽  
G.E. Morfill ◽  
E. Grun
Keyword(s):  
Time Scale ◽  
Particle Density ◽  
High Energy ◽  
Particle Removal ◽  
Density Region ◽  
Drag Forces ◽  
Orbit Evolution ◽  
History Of ◽  
Ring Particle ◽  
Ring Material

A number of lines of evidence suggest that the particles making up the E-ring are small, on the order of a few microns or less in size (Terrile and Tokunaga, 1980, BAAS; Pang et al., 1982 Saturn meeting; Tucson, AZ). This suggests that a variety of electromagnetic and plasma affects may be important in considering the history of such particles. We have shown (Morfill et al., 1982, J. Geophys. Res., in press) that plasma drags forces from the corotating plasma will rapidly evolve E-ring particle orbits to increasing distance from Saturn until a point is reached where radiation drag forces acting to decrease orbital radius balance this outward acceleration. This occurs at approximately Rhea's orbit, although the exact value is subject to many uncertainties. The time scale for plasma drag to move particles from Enceladus' orbit to the outer E-ring is ~104yr. A variety of effects also act to remove particles, primarily sputtering by both high energy charged particles (Cheng et al., 1982, J. Geophys. Res., in press) and corotating plasma (Morfill et al., 1982). The time scale for sputtering away one micron particles is also short, 102 - 10 yrs. Thus the detailed particle density profile in the E-ring is set by a competition between orbit evolution and particle removal. The high density region near Enceladus' orbit may result from the sputtering yeild of corotating ions being less than unity at this radius (e.g. Eviatar et al., 1982, Saturn meeting). In any case, an active source of E-ring material is required if the feature is not very ephemeral - Enceladus itself, with its geologically recent surface, appears still to be the best candidate for the ultimate source of E-ring material.

scholarly journals Interdisciplinary Research On Modeling And Scheduling Of Semiconductor Manufacturing Operations

2020 ◽  
Author(s):  
Jennie Si ◽  
Frank C. Hoppensteadt ◽  
Forouzan Golshani ◽  
Donald W. Collins ◽  
Christian Ringhofer ◽  
...  
Keyword(s):  
Interdisciplinary Research ◽  
Semiconductor Manufacturing ◽  
Manufacturing Operations

Supramolecular “Big Bang” in a Single-Ionic Surfactant/Water System Driven by Electrostatic Repulsion: From Vesicles to Micelles

Langmuir ◽  
2017 ◽  
Vol 33 (14) ◽  
pp. 3395-3403 ◽  
Author(s):  
Loïc Leclercq ◽  
Pierre Bauduin ◽  
Véronique Nardello-Rataj
Keyword(s):  
Water System ◽  
Big Bang ◽  
Ionic Surfactant ◽  
Electrostatic Repulsion

Influence of Surfactant Sparys on Agglomeration of Inhalable Particle

2014 ◽  
Vol 1044-1045 ◽  
pp. 344-347 ◽  
Author(s):  
De Shuai Sun ◽  
Long Fang ◽  
Ya Li Liu
Keyword(s):  
Nonionic Surfactant ◽  
Surfactant Concentration ◽  
Active Agent ◽  
Atmospheric Environment ◽  
Ionic Surfactant ◽  
Particle Removal ◽  
Inhalable Particles ◽  
Removal Efficiencies

Inhalable particles suspended in air were an important pollution of atmospheric Environment. Because of very small in size, they were different to be captured by conventional filter. Chemical active agent, surfactant and flocculate, were introduced into chamber and encouraged the agglomeration of inhalable particles. Nonionic surfactant could reduce more than 30% of particles, while ionic surfactant could lead to the decrement of 23-26%. The particle removal efficiencies were only 15-18% in the presence of polymer flocculate and slightly above that of water. The larger droplet of spray favored the agglomeration of inhalable particles. Increasing the surfactant concentration resulted in the higher removal of inhalable particle.

Analysis of Attitude and Dynamics Characteristic of a Kind of Submerged Buoy

2012 ◽  
Vol 226-228 ◽  
pp. 516-520 ◽  
Author(s):  
Jian Xun Wang ◽  
Hong Bin Gui ◽  
Xi Chen ◽  
Qiang Fu
Keyword(s):  
Low Frequency ◽  
Small Scale ◽  
Normal Fluid ◽  
Fluid Forces ◽  
Dynamical Characteristics ◽  
Drag Forces ◽  
Low Frequency Vibration ◽  
Fluid Drag ◽  
Mooring Cable ◽  
Dynamics Characteristic

In this paper, the attitude and dynamical characteristics of a kind of submerged buoy are studied. The attitude of the buoy system is calculated relatively accurately by mathematical derivations and programming, in which all the tangent and normal fluid drag forces and elastic deformation of the mooring cable are considered. Based on the ANSYS FEA software, the model of system in fluid is established, which takes the effects of fluid drag forces, pretension and additional mass into account. Then the analysis of the effect on dynamics characteristic of the system by considering the attitude or not is carried out. The results indicate that, for small-scale submerged buoy system, the completed fluid forces should not be ignored, and the vibration of mooring system of submerged buoy is most likely to be low-frequency vibration, which should be avoided in some ways.

Effect of Various Cleaning Solutions and Brush Scrubber Kinematics on the Frictional Attributes of Post Copper CMP Cleaning Process

2009 ◽  
Vol 145-146 ◽  
pp. 363-366 ◽  
Author(s):  
Yasa Sampurno ◽  
Yun Zhuang ◽  
Xun Gu ◽  
Sian Theng ◽  
Takenao Nemoto ◽  
...  
Keyword(s):  
Vinyl Alcohol ◽  
Direct Contact ◽  
Chemical Mechanical Planarization ◽  
Wafer Surface ◽  
Poly Vinyl Alcohol ◽  
Particle Removal ◽  
Cleaning Process ◽  
Cleaning Performance ◽  
Cleaning Solution ◽  
Copper Cmp

Brush scrubbing has been widely used in post chemical mechanical planarization (CMP) applications to remove contaminations, such as slurry residues and particles, from the wafer surface. During brush scrubbing, particle removal results from direct contact between a soft poly vinyl alcohol (PVA) brush and the wafer surface in which the brush asperities engulf the particles while the rotating motion of the brush, as well as the cleaning fluid at the surface, dislodge and carry the particles away from the wafer. The cleaning performance of brush scrubbing depends heavily on the choice of the cleaning solution and brush scrubber kinematics. In this work, the effect of various cleaning solutions and brush scrubber kinematics on the frictional attributes of post copper CMP cleaning process was investigated.

scholarly journals Vibrations due to Flow-Driven Repeated Impacts

2013 ◽  
Vol 2013 ◽  
pp. 1-17 ◽  
Author(s):  
Sumin Jeong ◽  
Natalie Baddour
Keyword(s):  
Failure Mechanism ◽  
Resonance Condition ◽  
Coefficient Of Restitution ◽  
Flowing Fluid ◽  
Drag Forces ◽  
Fluid Drag ◽  
Repetitive Impact ◽  
Ice Failure ◽  
Two Degree Of Freedom ◽  
Good Agreement

We consider a two-degree-of-freedom model where the focus is on analyzing the vibrations of a fixed but flexible structure that is struck repeatedly by a second object. The repetitive impacts due to the second mass are driven by a flowing fluid. Morison’s equation is used to model the effect of the fluid on the properties of the structure. The model is developed based on both linearized and quadratic fluid drag forces, both of which are analyzed analytically and simulated numerically. Conservation of linear momentum and the coefficient of restitution are used to characterize the nature of the impacts between the two masses. A resonance condition of the model is analyzed with a Fourier transform. This model is proposed to explain the nature of ice-induced vibrations, without the need for a model of the ice-failure mechanism. The predictions of the model are compared to ice-induced vibrations data that are available in the open literature and found to be in good agreement. Therefore, the use of a repetitive impact model that does not require modeling the ice-failure mechanism can be used to explain some of the observed behavior of ice-induced vibrations.

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