scholarly journals Focused Ion Beam Fabrication of SU-8 Waveguide Structures on Oxidized Silicon

MRS Advances ◽  
2017 ◽  
Vol 2 (18) ◽  
pp. 981-986 ◽  
Author(s):  
Swagata Samanta ◽  
Pallab Banerji ◽  
Pranabendu Ganguly
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Silicon Substrate ◽  
Focused Ion Beam ◽  
Ion Beam

ABSTRACTThis work deals with SU-8 waveguides and waveguide structures fabricated on an oxidized silicon substrate using ‘Focused ion beam (FIB) lithography’. From our experimentation it seems that FIB method is practically not suitable for fabricating long SU-8 waveguide structures, rather it is more suitable for nanoscale modification of already fabricated waveguides, such as, to fabricate photonic crystal structures.

scholarly journals Light Extraction From Scintillating Crystals Enhanced by Photonic Crystal Structures Patterned by Focused Ion Beam

2016 ◽  
Vol 63 (2) ◽  
pp. 644-648 ◽  
Author(s):  
Pawel Modrzynski ◽  
Teodor Gotszalk ◽  
Arno Knapitsch ◽  
Piotr Kunicki ◽  
Paul Lecoq ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Light Extraction

Y-TYPE PHOTONIC CRYSTAL WAVEGUIDE WITH MINIMUM BRANCHES SPACE

2006 ◽  
Vol 05 (06) ◽  
pp. 743-746
Author(s):  
SHOUZHEN HAN ◽  
JIE TIAN ◽  
CHENG REN ◽  
XINGSHENG XU ◽  
ZHIYUAN LE ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Integrated Circuits ◽  
Focused Ion Beam ◽  
Near Infrared ◽  
Ion Beam ◽  
Infrared Region ◽  
Photonic Crystal Waveguide ◽  
Ion Beam Etching ◽  
Optical Integrated Circuits ◽  
All Optical

The abstract should summarize the context, content and conclusions of the paper in less than 200 words. We fabricated a two-dimensional Y-branch photonic crystal waveguide in the near infrared region by using focused ion beam etching and depositing system. The light guide characters of the waveguide were measured for three different spaces between branches. Field intensity distributions of TE polarized wave in the branches were simulated by using the transfer matrix method. Both the theoretical and experimental results show that the shortest space between branches of the photonic crystal waveguide is about 1.4 times wavelength of transmitted light. If the space became shorter, the light in the two branches would couple to each other seriously. This result might be helpful for the design of compact wave demultiplexer and all-optical integrated circuits.

Preparation and characterization of GaN photonic crystal arrays by focused ion beam technology

2011 ◽  
Vol 206 (5) ◽  
pp. 801-805 ◽  
Author(s):  
G.M. Wu ◽  
C.C. Yen ◽  
B.H. Tsai ◽  
H.W. Chien
Keyword(s):  
Photonic Crystal ◽  
Focused Ion Beam ◽  
Ion Beam
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