Photoemission Characterization of Thin Film Nucleation on Inert Substrates

1989 ◽  
Vol 159 ◽  
Author(s):  
G. Haugstad ◽  
A. Raisanen ◽  
C. Caprile ◽  
X. Yu ◽  
A. Franciosi

ABSTRACTSynchrotron radiation photoemission was used to characterize Sm and Mn thin film nucleation and growth on solid Xe substrates, in the 3×1014 - 2×1016 atoms/cm2 coverage range. Film growth is well approximated by a model in which the nucleation site density remains constant and hemi-ellipsoidal particles increase in size until coalescence is achieved. Site density and average cluster size are determined from the coverage-dependence of metal and Xe photoemission intensities. Size estimates are confirmed by experimental fingerprints of coalescence.

Science ◽  
2008 ◽  
Vol 321 (5885) ◽  
pp. 108-111 ◽  
Author(s):  
G. Hlawacek ◽  
P. Puschnig ◽  
P. Frank ◽  
A. Winkler ◽  
C. Ambrosch-Draxl ◽  
...  

2008 ◽  
Vol 600-603 ◽  
pp. 227-230 ◽  
Author(s):  
Yoshimine Kato ◽  
Kazuo Sakumoto

SiC growth on as-received and striated Si(001) substrates was studied. SiC films were grown by pulsed-jet chemical vapor deposition using monomethylsilane as a gas source at 780°C. Two kinds of Si surfaces were prepared. One was an as-received Si(001) surface and the other was an striated (scratched) Si(001) surface. It was found that nucleation rate of SiC is quite different between these two kinds of surfaces. The film growth rate was very low for the as-received Si(001) surface compared with the striated surface, and after 8 hours of growth hardly any film was grown and only square-shaped islands were observed. On the other hand, for the undulant substrate about 100nm thick 3C-SiC film was grown after 8 hours of deposition. This film growth rate difference appears to be due to the difference in density of nucleation sites. For the as-received Si(001) surface, nucleation site density appears to be quite small due to the atomically flat surface. On the other hand, for the undulant surface, nucleation site density was large enough for the film to grow faster.


1990 ◽  
Vol 206 ◽  
Author(s):  
I. Yamada ◽  
G.H. Takaoka ◽  
H. Usui ◽  
S.K. Koh

ABSTRACTAtomic scale imaging by STM and TEM of the initial stages of film growth of Ag and Au on graphite substrates indicate that the film nucleation processes are markedly different for ionized cluster beam (ICB) and molecular beam (MBE) deposition. Recent results on measurements of cluster size and formation of epitaxial metal-semiconductor layers by ICB are also discussed.


2002 ◽  
Vol 506 (3) ◽  
pp. 228-234 ◽  
Author(s):  
Y.D Kim ◽  
J Stultz ◽  
D.W Goodman

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