Inelastic scattering techniques for in situ characterization of thin film growth: backscatter Kikuchi diffraction

2011 ◽  
pp. 29-51
Author(s):  
N.J.C. Ingle
Keyword(s):  
Thin Film ◽  
Inelastic Scattering ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Characterization

In situ characterization of thin film growth

2011 ◽  
Author(s):  
Gertjan Koster ◽  
Guus Rijnders
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth

Simulation of thin film growth and in situ characterization by RHEED and photoemission

Vacuum ◽  
1995 ◽  
Vol 46 (8-10) ◽  
pp. 931-934 ◽  
Author(s):  
M Djafari Rouhani ◽  
N Fazouan ◽  
AM Gue ◽  
D Estève
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Characterization

scholarly journals Why in situ, real-time characterization of thin film growth processes?

1995 ◽  
Author(s):  
O. Auciello ◽  
A.R. Krauss
Keyword(s):  
Thin Film ◽  
Real Time ◽  
Film Growth ◽  
Thin Film Growth ◽  
Growth Processes

scholarly journals Resolving the Evolution of Atomic Layer-Deposited Thin-Film Growth by Continuous In Situ X-Ray Absorption Spectroscopy

2021 ◽  
Author(s):  
Xiaohui Qu ◽  
Danhua Yan ◽  
Ruoshui Li ◽  
Jiajie Cen ◽  
Chenyu Zhou ◽  
...  
Keyword(s):  
Thin Film ◽  
Absorption Spectroscopy ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
X Ray ◽  
X Ray Absorption

Development of a scanning probe microscopy integrated atomic layer deposition system for in situ successive monitoring of thin film growth

2018 ◽  
Vol 89 (12) ◽  
pp. 123702 ◽  
Author(s):  
Kun Cao ◽  
Quan Hu ◽  
Jiaming Cai ◽  
Miao Gong ◽  
Jianfeng Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
Scanning Probe Microscopy ◽  
Film Growth ◽  
Atomic Layer ◽  
Thin Film Growth ◽  
Scanning Probe ◽  
Probe Microscopy ◽  
Layer Deposition
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